Hiroshi Miki

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Double-layer shutter sputtering apparatus
- Patent number 8,900,426
- Issue date Dec 2, 2014
- Canon Anelva Corporation
- Shuji Nomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Double-layer shutter control method of multi-sputtering system
- Patent number 7,850,827
- Issue date Dec 14, 2010
- Canon Anelva Corporation
- Shuji Nomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DOUBLE-LAYER SHUTTER SPUTTERING APPARATUS
- Publication number 20120097533
- Publication date Apr 26, 2012
- Canon ANELVA Corporation
- Shuji NOMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOUBLE-LAYER SHUTTER CONTROL METHOD OF MULTI-SPUTTERING SYSTEM
- Publication number 20090139865
- Publication date Jun 4, 2009
- Canon ANELVA Corporation
- Shuji Nomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Double-layer shutter control method of multi-sputtering system
- Publication number 20050199490
- Publication date Sep 15, 2005
- ANELVA CORPORATION
- Shuji Nomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...