Hiroshi Miyabayashi

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate manufacturing method and substrate processing apparatus
- Patent number 7,256,104
- Issue date Aug 14, 2007
- Canon Kabushiki Kaisha
- Masataka Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor-on-insulator annealing method
- Patent number 6,660,606
- Issue date Dec 9, 2003
- Canon Kabushiki Kaisha
- Hiroshi Miyabayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20070190746
- Publication date Aug 16, 2007
- Canon Kabushiki Kaisha
- Masataka Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate manufacturing method and substrate processing apparatus
- Publication number 20040259328
- Publication date Dec 23, 2004
- Canon Kabushiki Kaisha
- Masataka Ito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOI substrate annealing method and SOI substrate
- Publication number 20020061631
- Publication date May 23, 2002
- Hiroshi Miyabayashi
- H01 - BASIC ELECTRIC ELEMENTS