Hiroshi Miyai

Person

Hitachi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam device for scanning a sample using a charged...
- Patent number 8,421,010
- Issue date Apr 16, 2013
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern check device and pattern check method
- Patent number 8,421,008
- Issue date Apr 16, 2013
- Hitachi High-Technologies Corporation
- Mari Nozoe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Appearance inspection apparatus with scanning electron microscope a...
- Patent number 8,086,021
- Issue date Dec 27, 2011
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam inspection system and an image generation method for...
- Patent number 8,086,022
- Issue date Dec 27, 2011
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus for inspecting patterns of a substrate
- Patent number 8,036,447
- Issue date Oct 11, 2011
- Hitachi High-Technologies Corporation
- Koichi Hayakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection apparatus and inspection method using electron beam
- Patent number 7,999,565
- Issue date Aug 16, 2011
- Hitachi High-Technologies Corporation
- Yasuhiro Gunji
- G01 - MEASURING TESTING
Information Patent Grant
Method of alignment for efficient defect review
- Patent number 7,995,833
- Issue date Aug 9, 2011
- Hitachi High-Technologies Corporation
- Takehiko Konno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,957,579
- Issue date Jun 7, 2011
- Hitachi, Ltd.
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,894,658
- Issue date Feb 22, 2011
- Hitachi, Ltd.
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and apparatus using an electron beam
- Patent number 7,855,363
- Issue date Dec 21, 2010
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus and inspection method using electron beam
- Patent number 7,518,383
- Issue date Apr 14, 2009
- Hitachi High-Technologies Corporation
- Yasuhiro Gunji
- G01 - MEASURING TESTING
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,457,453
- Issue date Nov 25, 2008
- Hitachi, Ltd.
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection method and apparatus using an electron beam
- Patent number 7,425,704
- Issue date Sep 16, 2008
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of alignment for efficient defect review
- Patent number 7,294,833
- Issue date Nov 13, 2007
- Hitachi High-Technologies Corporation
- Takehiko Konno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and its apparatus for inspecting a pattern
- Patent number 7,269,280
- Issue date Sep 11, 2007
- Hitachi, Ltd.
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,266,235
- Issue date Sep 4, 2007
- Hitachi, Ltd.
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 7,133,550
- Issue date Nov 7, 2006
- Hitachi, Ltd.
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of inspecting a pattern and an apparatus thereof and a metho...
- Patent number 7,116,816
- Issue date Oct 3, 2006
- Hitachi, Ltd.
- Maki Tanaka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting a semiconductor device
- Patent number 7,116,817
- Issue date Oct 3, 2006
- Hitachi, Ltd.
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Grant
Circuit pattern inspection method and its apparatus
- Patent number 7,071,468
- Issue date Jul 4, 2006
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus for inspecting a specimen
- Patent number 7,049,587
- Issue date May 23, 2006
- Hitachi, Ltd.
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection method and apparatus using an electron beam
- Patent number 7,034,298
- Issue date Apr 25, 2006
- Hitachi High-Technologies Corporation
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Circuit pattern inspection method and apparatus
- Patent number 6,975,754
- Issue date Dec 13, 2005
- Hitachi, Ltd.
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for inspecting a semiconductor device
- Patent number 6,952,492
- Issue date Oct 4, 2005
- Hitachi, Ltd.
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Grant
Circuit pattern inspection method and apparatus
- Patent number 6,898,305
- Issue date May 24, 2005
- Hitachi, Ltd.
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Pattern inspection method and apparatus
- Patent number 6,865,288
- Issue date Mar 8, 2005
- Hitachi, Ltd.
- Chie Shishido
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of inspecting circuit pattern and inspecting instrument
- Patent number 6,703,850
- Issue date Mar 9, 2004
- Hitachi, Ltd.
- Mari Nozoe
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Method of fabricating a semiconductor device
- Patent number 6,613,593
- Issue date Sep 2, 2003
- Hitachi, Ltd.
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting circuit pattern and inspecting instrument
- Patent number 6,583,634
- Issue date Jun 24, 2003
- Hitachi, Ltd.
- Mari Nozoe
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Method and apparatus for inspecting or measuring a sample based on...
- Patent number 6,465,781
- Issue date Oct 15, 2002
- Hitachi, Ltd.
- Norimasa Nishimura
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEFECT INSPECTING APPARATUS
- Publication number 20130248709
- Publication date Sep 26, 2013
- Hitachi High-Technologies Corporation
- Takuma Yamamoto
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED-PARTICLE MICROSCOPE DEVICE, AND METHOD OF CONTROLLING CHARG...
- Publication number 20120091339
- Publication date Apr 19, 2012
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN CHECK DEVICE AND PATTERN CHECK METHOD
- Publication number 20110278452
- Publication date Nov 17, 2011
- Mari Nozoe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20110163230
- Publication date Jul 7, 2011
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pattern Inspection Method And Apparatus
- Publication number 20100246933
- Publication date Sep 30, 2010
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION APPARATUS FOR INSPECTING PATTERNS OF A SUBSTRATE
- Publication number 20100008564
- Publication date Jan 14, 2010
- Hitachi High-Technologies Corporation
- Koichi Hayakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPERANCE INSPECTION APPARATUS WITH SCANNING ELECTRON MICROSCOPE AN...
- Publication number 20090208092
- Publication date Aug 20, 2009
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD USING ELECTRON BEAM
- Publication number 20090123059
- Publication date May 14, 2009
- Hitachi High-Technologies Corporation
- Yasuhiro GUNJI
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and apparatus using an electron beam
- Publication number 20090045338
- Publication date Feb 19, 2009
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Beam Inspection System and an Image Generation Method for...
- Publication number 20090026369
- Publication date Jan 29, 2009
- Hitachi High-Technologies Corporation
- Hiroshi MIYAI
- G01 - MEASURING TESTING
Information Patent Application
Inspection apparatus and an inspection method
- Publication number 20080099675
- Publication date May 1, 2008
- Hitachi High-Technologies Corporation
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Inspection Method And Apparatus
- Publication number 20080063257
- Publication date Mar 13, 2008
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Inspection Method And Apparatus
- Publication number 20080056559
- Publication date Mar 6, 2008
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of alignment for efficient defect review
- Publication number 20080042061
- Publication date Feb 21, 2008
- Hitachi High-Technologies Corporation
- Takehiko Konno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND ITS APPARATUS FOR INSPECTING A PATTERN
- Publication number 20080002876
- Publication date Jan 3, 2008
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PATTERN INSPECTION METHOD AND APPARATUS
- Publication number 20070269101
- Publication date Nov 22, 2007
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern inspection method and system therefor
- Publication number 20070131877
- Publication date Jun 14, 2007
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD USING ELECTRON BEAM
- Publication number 20060251318
- Publication date Nov 9, 2006
- Hitachi High-Technologies Corporation
- Yasuhiro GUNJI
- G01 - MEASURING TESTING
Information Patent Application
Inspection method and apparatus using an electron beam
- Publication number 20060192117
- Publication date Aug 31, 2006
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection apparatus for inspecting patterns of a substrate
- Publication number 20060171593
- Publication date Aug 3, 2006
- Hitachi High-Technologies Corporation
- Koichi Hayakawa
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for inspecting a semiconductor device
- Publication number 20060018532
- Publication date Jan 26, 2006
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Application
Circuit pattern inspection method and its apparatus
- Publication number 20050109938
- Publication date May 26, 2005
- Hiroshi Miyai
- G01 - MEASURING TESTING
Information Patent Application
Method of alignment for efficient defect review
- Publication number 20040232332
- Publication date Nov 25, 2004
- Hitachi High-Technologies Corporation
- Takehiko Konno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection method and apparatus using an electron beam
- Publication number 20040188609
- Publication date Sep 30, 2004
- Hiroshi Miyai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of inspecting circuit pattern and inspecting instrument
- Publication number 20030206027
- Publication date Nov 6, 2003
- Hitachi, Ltd.
- Mari Nozoe
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
Pattern inspection method and system therefor
- Publication number 20030062487
- Publication date Apr 3, 2003
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Application
Apparatus for inspecting a specimen
- Publication number 20030063792
- Publication date Apr 3, 2003
- Takashi Hiroi
- G01 - MEASURING TESTING
Information Patent Application
Method and its apparatus for inspecting a pattern
- Publication number 20030007677
- Publication date Jan 9, 2003
- Takashi Hiroi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for inspecting a semiconductor device
- Publication number 20020197750
- Publication date Dec 26, 2002
- Maki Tanaka
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting a semiconductor device
- Publication number 20020195574
- Publication date Dec 26, 2002
- Maki Tanaka
- G01 - MEASURING TESTING

Hiroshi Miyai

Person

Patents Grantslast 30 patents

Charged particle beam device for scanning a sample using a charged...

Pattern check device and pattern check method

Appearance inspection apparatus with scanning electron microscope a...

Electron beam inspection system and an image generation method for...

Inspection apparatus for inspecting patterns of a substrate

Inspection apparatus and inspection method using electron beam

Method of alignment for efficient defect review

Pattern inspection method and apparatus

Pattern inspection method and apparatus

Inspection method and apparatus using an electron beam

Inspection apparatus and inspection method using electron beam

Pattern inspection method and apparatus

Inspection method and apparatus using an electron beam

Method of alignment for efficient defect review

Method and its apparatus for inspecting a pattern

Pattern inspection method and apparatus

Pattern inspection method and apparatus

Method of inspecting a pattern and an apparatus thereof and a metho...

Method and apparatus for inspecting a semiconductor device

Circuit pattern inspection method and its apparatus

Apparatus for inspecting a specimen

Inspection method and apparatus using an electron beam

Circuit pattern inspection method and apparatus

Method and apparatus for inspecting a semiconductor device

Circuit pattern inspection method and apparatus

Pattern inspection method and apparatus

Method of inspecting circuit pattern and inspecting instrument

Method of fabricating a semiconductor device

Method of inspecting circuit pattern and inspecting instrument

Method and apparatus for inspecting or measuring a sample based on...

Patents Applicationslast 30 patents

DEFECT INSPECTING APPARATUS

CHARGED-PARTICLE MICROSCOPE DEVICE, AND METHOD OF CONTROLLING CHARG...

PATTERN CHECK DEVICE AND PATTERN CHECK METHOD

CHARGED PARTICLE BEAM DEVICE

Pattern Inspection Method And Apparatus

INSPECTION APPARATUS FOR INSPECTING PATTERNS OF A SUBSTRATE

APPERANCE INSPECTION APPARATUS WITH SCANNING ELECTRON MICROSCOPE AN...

INSPECTION APPARATUS AND INSPECTION METHOD USING ELECTRON BEAM

Inspection method and apparatus using an electron beam

Electron Beam Inspection System and an Image Generation Method for...

Inspection apparatus and an inspection method

Pattern Inspection Method And Apparatus

Pattern Inspection Method And Apparatus

Method of alignment for efficient defect review

METHOD AND ITS APPARATUS FOR INSPECTING A PATTERN

PATTERN INSPECTION METHOD AND APPARATUS

Pattern inspection method and system therefor

INSPECTION APPARATUS AND INSPECTION METHOD USING ELECTRON BEAM

Inspection method and apparatus using an electron beam

Inspection apparatus for inspecting patterns of a substrate

Method and apparatus for inspecting a semiconductor device

Circuit pattern inspection method and its apparatus

Method of alignment for efficient defect review

Inspection method and apparatus using an electron beam

Method of inspecting circuit pattern and inspecting instrument

Pattern inspection method and system therefor

Apparatus for inspecting a specimen

Method and its apparatus for inspecting a pattern

Method and apparatus for inspecting a semiconductor device

Method and apparatus for inspecting a semiconductor device