Hiroshi MIZUNOURA

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Koshi-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,036,140
- Issue date Jun 15, 2021
- Tokyo Electron Limited
- Shinichiro Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing method and com...
- Patent number 10,955,743
- Issue date Mar 23, 2021
- Tokyo Electron Limited
- Hiroshi Mizunoura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating and developing method and coating and developing apparatus
- Patent number 10,732,508
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Shinichiro Kawakami
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Coating and developing method and coating and developing apparatus
- Patent number 10,394,125
- Issue date Aug 27, 2019
- Tokyo Electron Limited
- Shinichiro Kawakami
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 10,139,732
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Shinichiro Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20200233308
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Shinichiro Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING METHOD AND COATING AND DEVELOPING APPARATUS
- Publication number 20190332013
- Publication date Oct 31, 2019
- TOKYO ELECTRON LIMITED
- Shinichiro KAWAKAMI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...
- Publication number 20190317407
- Publication date Oct 17, 2019
- TOKYO ELECTRON LIMITED
- Hiroshi MIZUNOURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20180284616
- Publication date Oct 4, 2018
- TOKYO ELECTRON LIMITED
- Shinichiro Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COATING AND DEVELOPING METHOD AND COATING AND DEVELOPING APPARATUS
- Publication number 20180088466
- Publication date Mar 29, 2018
- TOKYO ELECTRON LIMITED
- Shinichiro KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS