Hiroshi Motono

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Kanagawa-Ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heat treatment system and method therefore
- Patent number 7,819,658
- Issue date Oct 26, 2010
- Tokyo Electron Limited
- Kazunari Sakata
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heat treatment system and a method for cooling a loading chamber
- Patent number 7,059,849
- Issue date Jun 13, 2006
- Tokyo Electron Limited
- Kazunari Sakata
- F27 - FURNACES KILNS OVENS RETORTS

Patents Applicationslast 30 patents

Information Patent Application
Heat treatment system and method therefore
- Publication number 20070166657
- Publication date Jul 19, 2007
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vertical heat treatment system, method for controlling vertical hea...
- Publication number 20020023458
- Publication date Feb 28, 2002
- Kazunari Sakata
- H01 - BASIC ELECTRIC ELEMENTS