Membership
Tour
Register
Log in
Hiroshi Nagahata
Follow
Person
Nirasaki-shi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Temperature estimation apparatus, plasma processing system, tempera...
Patent number
12,170,193
Issue date
Dec 17, 2024
Tokyo Electron Limited
Yuki Kataoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tool health monitoring and classifications with virtual metrology a...
Patent number
11,669,079
Issue date
Jun 6, 2023
Tokyo Electron Limited
Jun Shinagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
10,832,891
Issue date
Nov 10, 2020
Tokyo Electron Limited
Ryota Sakane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Processing method and processing apparatus
Patent number
10,676,823
Issue date
Jun 9, 2020
Tokyo Electron Limited
Ryota Sakane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of processing target object
Patent number
9,780,037
Issue date
Oct 3, 2017
Tokyo Electron Limited
Kazuya Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Determination method, control method, determination apparatus, patt...
Patent number
9,396,911
Issue date
Jul 19, 2016
Tokyo Electron Limited
Keisuke Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method, plasma processing apparatus and storage m...
Patent number
8,058,585
Issue date
Nov 15, 2011
Tokyo Electron Limited
Hiroki Amemiya
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Patents Applications
last 30 patents
Information
Patent Application
TOOL HEALTH MONITORING AND CLASSIFICATIONS WITH VIRTUAL METROLOGY A...
Publication number
20230009419
Publication date
Jan 12, 2023
TOKYO ELECTRON LIMITED
Jun SHINAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER POSITION ADJU...
Publication number
20220310369
Publication date
Sep 29, 2022
TOKYO ELECTRON LIMITED
Joji TAKAYOSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE ESTIMATION APPARATUS, PLASMA PROCESSING SYSTEM, TEMPERA...
Publication number
20220068602
Publication date
Mar 3, 2022
TOKYO ELECTRON LIMITED
Yuki KATAOKA
G01 - MEASURING TESTING
Information
Patent Application
PROCESSING APPARATUS AND METHOD FOR CONTROLLING PROCESSING APPARATUS
Publication number
20190318914
Publication date
Oct 17, 2019
TOKYO ELECTRON LIMITED
Naohiko OKUNISHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20180158650
Publication date
Jun 7, 2018
TOKYO ELECTRON LIMITED
Ryota Sakane
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING METHOD AND PROCESSING APPARATUS
Publication number
20180148838
Publication date
May 31, 2018
TOKYO ELECTRON LIMITED
Ryota Sakane
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF PROCESSING TARGET OBJECT
Publication number
20170084542
Publication date
Mar 23, 2017
TOKYO ELECTRON LIMITED
Kazuya Kato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN FORMING SYSTEM AND SUBSTRATE PROCESSING SYSTEM
Publication number
20160300698
Publication date
Oct 13, 2016
TOKYO ELECTRON LIMITED
Keisuke Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETERMINATION METHOD, CONTROL METHOD, DETERMINATION APPARATUS, PATT...
Publication number
20120249986
Publication date
Oct 4, 2012
TOKYO ELECTRON LIMITED
Keisuke Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing method, plasma processing apparatus and storage m...
Publication number
20070221632
Publication date
Sep 27, 2007
Hiroki Amemiya
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL