Hiroshi Nakamura

Person

Yamanashi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, estimation method of substrate proc...
- Patent number 12,051,587
- Issue date Jul 30, 2024
- Tokyo Electron Limited
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method and substrate treatment system
- Patent number 11,876,022
- Issue date Jan 16, 2024
- Tokyo Electron Limited
- Masashi Enomoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate inspection system, substrate inspection method and record...
- Patent number 11,555,691
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Hiroshi Nakamura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Support information display method, maintenance support method of s...
- Patent number 9,810,905
- Issue date Nov 7, 2017
- Tokyo Electron Limited
- Toshiaki Kodama
- G02 - OPTICS
Information Patent Grant
Substrate processing apparatus, control method adopted in substrate...
- Patent number 8,859,046
- Issue date Oct 14, 2014
- Tokyo Electron Limited
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, system and program
- Patent number 8,475,623
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method
- Patent number 8,367,308
- Issue date Feb 5, 2013
- Tokyo Electron Limited
- Hiroshi Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System, method and storage medium for controlling a processing system
- Patent number 8,280,852
- Issue date Oct 2, 2012
- Tokyo Electron Limited
- Hiroshi Nakamura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing method, system and program
- Patent number 8,257,601
- Issue date Sep 4, 2012
- Tokyo Electron Limited
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, program for performing operation an...
- Patent number 8,172,949
- Issue date May 8, 2012
- Tokyo Electron Limited
- Tomoyuki Kudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method
- Patent number 8,110,325
- Issue date Feb 7, 2012
- Tokyo Electron Limited
- Takafumi Niwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 7,854,821
- Issue date Dec 21, 2010
- Tokyo Electron Limited
- Hiroshi Nakamura
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for cleaning substrate processing apparatus, substrate proce...
- Patent number 7,846,257
- Issue date Dec 7, 2010
- Tokyo Electron Limited
- Hiroshi Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, program for performing operation an...
- Patent number 7,756,599
- Issue date Jul 13, 2010
- Tokyo Electron Limited
- Tomoyuki Kudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Capacitive coupling plasma processing apparatus and method
- Patent number 7,692,916
- Issue date Apr 6, 2010
- Tokyo Electron Limited
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of inspecting substrate processing apparatus, and storage me...
- Patent number 7,191,082
- Issue date Mar 13, 2007
- Tokyo Electron Limited
- Akira Obi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...
- Publication number 20240355617
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...
- Publication number 20210387224
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD AND...
- Publication number 20210262781
- Publication date Aug 26, 2021
- TOKYO ELECTRON LIMITED
- Masahide Tadokoro
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM
- Publication number 20210183712
- Publication date Jun 17, 2021
- TOKYO ELECTRON LIMITED
- Masashi ENOMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION SYSTEM, SUBSTRATE INSPECTION METHOD AND RECORD...
- Publication number 20200386538
- Publication date Dec 10, 2020
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUPPORT INFORMATION DISPLAY METHOD, MAINTENANCE SUPPORT METHOD OF S...
- Publication number 20140240484
- Publication date Aug 28, 2014
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- G02 - OPTICS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
- Publication number 20120292290
- Publication date Nov 22, 2012
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD ADOPTED IN SUBSTRATE...
- Publication number 20120046774
- Publication date Feb 23, 2012
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD
- Publication number 20110200923
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Takafumi NIWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20110200949
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM
- Publication number 20110171830
- Publication date Jul 14, 2011
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROGRAM FOR PERFORMING OPERATION AN...
- Publication number 20100154995
- Publication date Jun 24, 2010
- TOKYO ELECTRON LIMITED
- Tomoyuki Kudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM, METHOD AND STORAGE MEDIUM FOR CONTROLLING A PROCESSING SYSTEM
- Publication number 20090076640
- Publication date Mar 19, 2009
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR CLEANING VACUUM APPARATUS, DEVICE FOR CONTROLLING VACUUM...
- Publication number 20080154410
- Publication date Jun 26, 2008
- TOKYO ELECTRON LIMITED
- Hiroshi NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CLEANING SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCE...
- Publication number 20070131253
- Publication date Jun 14, 2007
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- B08 - CLEANING
Information Patent Application
Capacitive coupling plasma processing apparatus and method
- Publication number 20070029194
- Publication date Feb 8, 2007
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20070009649
- Publication date Jan 11, 2007
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus, control method adopted in substrate...
- Publication number 20060176928
- Publication date Aug 10, 2006
- TOKYO ELECTRON LIMITED
- Hiroshi Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of inspecting substrate processing apparatus, and storage me...
- Publication number 20060160256
- Publication date Jul 20, 2006
- TOKYO ELECTRON LIMITED
- Akira Obi
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate processing apparatus, program for performing operation an...
- Publication number 20060105548
- Publication date May 18, 2006
- TOKYO ELECTRON LIMITED
- Tomoyuki Kudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method, system and program
- Publication number 20060090703
- Publication date May 4, 2006
- TOKYO ELECTRON LIMITED
- Seiichi Kaise
- H01 - BASIC ELECTRIC ELEMENTS

Hiroshi Nakamura

Person

Patents Grantslast 30 patents

Substrate processing apparatus, estimation method of substrate proc...

Substrate treatment method and substrate treatment system

Substrate inspection system, substrate inspection method and record...

Support information display method, maintenance support method of s...

Substrate processing apparatus, control method adopted in substrate...

Substrate processing method, system and program

Substrate processing method

System, method and storage medium for controlling a processing system

Substrate processing method, system and program

Substrate processing apparatus, program for performing operation an...

Substrate treatment method

Substrate processing apparatus

Method for cleaning substrate processing apparatus, substrate proce...

Substrate processing apparatus, program for performing operation an...

Capacitive coupling plasma processing apparatus and method

Method of inspecting substrate processing apparatus, and storage me...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...

SUBSTRATE PROCESSING APPARATUS, ESTIMATION METHOD OF SUBSTRATE PROC...

INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD AND...

SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT SYSTEM

SUBSTRATE INSPECTION SYSTEM, SUBSTRATE INSPECTION METHOD AND RECORD...

SUPPORT INFORMATION DISPLAY METHOD, MAINTENANCE SUPPORT METHOD OF S...

SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM

SUBSTRATE PROCESSING APPARATUS, CONTROL METHOD ADOPTED IN SUBSTRATE...

SUBSTRATE TREATMENT METHOD

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD, SYSTEM AND PROGRAM

SUBSTRATE PROCESSING APPARATUS, PROGRAM FOR PERFORMING OPERATION AN...

SYSTEM, METHOD AND STORAGE MEDIUM FOR CONTROLLING A PROCESSING SYSTEM

METHOD FOR CLEANING VACUUM APPARATUS, DEVICE FOR CONTROLLING VACUUM...

METHOD FOR CLEANING SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCE...

Capacitive coupling plasma processing apparatus and method

Substrate processing apparatus

Substrate processing apparatus, control method adopted in substrate...

Method of inspecting substrate processing apparatus, and storage me...

Substrate processing apparatus, program for performing operation an...

Substrate processing method, system and program