Hiroshi Narushima

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Vacuum container apparatus used for manufacturing semiconductor dev...
- Patent number 7,762,425
- Issue date Jul 27, 2010
- Tokyo Electron Limited
- Toru Kimura
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
Cover body device and vacuum vessel device
- Publication number 20060021992
- Publication date Feb 2, 2006
- Tokyo Electron Limited
- Hiroshi Narushima
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...