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Hiroshi Nishi
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Kanagawa, JP
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last 30 patents
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Patent Grant
Apparatus of and method for polishing the outer circumferential por...
Patent number
6,478,660
Issue date
Nov 12, 2002
Speedfam Co., Ltd.
Shunji Hakomori
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
APPARATUS OF AND METHOD FOR POLISHING THE OUTER CIRCUMFERENTIAL POR...
Publication number
20020137439
Publication date
Sep 26, 2002
Shunji Hakomori
B24 - GRINDING POLISHING