Hiroshi Nishihata

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid processing method, memory medium and liquid processing appar...
- Patent number 9,972,512
- Issue date May 15, 2018
- Tokyo Electron Limited
- Akiko Kai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing method, memory medium and liquid processing appar...
- Patent number 9,786,488
- Issue date Oct 10, 2017
- Tokyo Electron Limited
- Akiko Kai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...
- Publication number 20180019112
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Akiko KAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...
- Publication number 20160096203
- Publication date Apr 7, 2016
- TOKYO ELECTRON LIMITED
- Akiko Kai
- B08 - CLEANING