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Hiroshi Nishizato
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Narita, JP
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last 30 patents
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Patent Grant
Apparatus for producing a thin film of tantalum oxide
Patent number
5,203,925
Issue date
Apr 20, 1993
Matsushita Electric Industrial Co., Ltd.
Munehiro Shibuya
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...