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Hiroshi Okada
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Kyoto, JP
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last 30 patents
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Patent Grant
Method of determining impurity content and apparatus for the same
Patent number
6,278,267
Issue date
Aug 21, 2001
Dainippon Screen Mfg. Co., Ltd.
Hiroshi Okada
G01 - MEASURING TESTING
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Patent Grant
Apparatus and method for electrical measurement of semiconductor wa...
Patent number
5,504,437
Issue date
Apr 2, 1996
Dainippon Screen Mfg. Co., Ltd.
Sadao Hirae
G01 - MEASURING TESTING