Hiroshi Osawa

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Tochigi-ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Laser gas supply path structure in an exposure apparatus
- Patent number 6,847,672
- Issue date Jan 25, 2005
- Canon Kabushiki Kaisha
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas supply path structure for a gas laser
- Patent number 6,804,285
- Issue date Oct 12, 2004
- Canon Kabushiki Kaisha
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS SUPPLY PATH STRUCTURE, GAS SUPPLY METHOD, LASER OSCILLATING APP...
- Publication number 20030058912
- Publication date Mar 27, 2003
- TADAHIRO OHMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exposure apparatus, and device production method
- Publication number 20020071467
- Publication date Jun 13, 2002
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS