Hiroshi Osawa

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement apparatus for measuring a surface shape of an object ba...
- Patent number 9,062,967
- Issue date Jun 23, 2015
- Canon Kabushiki Kaisha
- Hiroshi Osawa
- G01 - MEASURING TESTING
Information Patent Grant
Particle remover, exposure apparatus having the same, and device ma...
- Patent number 7,414,240
- Issue date Aug 19, 2008
- Canon Kabushiki Kaisha
- Akinori Ohkubo
- B08 - CLEANING
Information Patent Grant
Exposure apparatus comprising cleaning apparatus for cleaning mask...
- Patent number 7,379,151
- Issue date May 27, 2008
- Canon Kabushiki Kaisha
- Hiroshi Osawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
X-ray mask and X-ray exposure method using the same
- Patent number 6,101,237
- Issue date Aug 8, 2000
- Canon Kabushiki Kaisha
- Takeshi Miyachi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positional deviation measuring device and method for measuring the...
- Patent number 5,751,426
- Issue date May 12, 1998
- Canon Kabushiki Kaisha
- Noriyuki Nose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting system
- Patent number 5,726,758
- Issue date Mar 10, 1998
- Canon Kabushiki Kaisha
- Masanobu Hasegawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting apparatus and a method for manufacturing semicon...
- Patent number 5,717,492
- Issue date Feb 10, 1998
- Canon Kabushiki Kaisha
- Koichi Sentoku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wavelength compensator in a helium ambience
- Patent number 5,483,343
- Issue date Jan 9, 1996
- Canon Kabushiki Kaisha
- Kazunori Iwamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift device and laser apparatus utilizing the same
- Patent number 5,477,554
- Issue date Dec 19, 1995
- Canon Kabushiki Kaisha
- Minouru Yoshii
- G02 - OPTICS
Information Patent Grant
Method and apparatus for measuring deviation between patterns on a...
- Patent number 5,313,272
- Issue date May 17, 1994
- Canon Kabushiki Kaisha
- Noriyuki Nose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for detecting the relative position of first and second objects
- Patent number 5,155,370
- Issue date Oct 13, 1992
- Canon Kabushiki Kaisha
- Hiroshi Osawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical head device having a light splitter with a diffraction grat...
- Patent number 5,051,974
- Issue date Sep 24, 1991
- Canon Kabushiki Kaisha
- Naosato Taniguchi
- G02 - OPTICS
Information Patent Grant
Integrated optical head
- Patent number 4,887,255
- Issue date Dec 12, 1989
- Canon Kabushiki Kaisha
- Yuichi Handa
- G02 - OPTICS
Information Patent Grant
Optical head device with diffraction grating for separating a light...
- Patent number 4,733,065
- Issue date Mar 22, 1988
- Canon Kabushiki Kaisha
- Hiroaki Hoshi
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT APPARATUS
- Publication number 20150070710
- Publication date Mar 12, 2015
- Canon Kabushiki Kaisha
- Hiroshi Osawa
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT APPARATUS
- Publication number 20130235386
- Publication date Sep 12, 2013
- Canon Kabushiki Kaisha
- Hiroshi Osawa
- G01 - MEASURING TESTING
Information Patent Application
CLEANING APPARATUS AND METHOD, EXPOSURE APPARATUS HAVING THE CLEANI...
- Publication number 20090020137
- Publication date Jan 22, 2009
- Canon Kabushiki Kaisha
- Hiroshi Osawa
- B08 - CLEANING
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20070013892
- Publication date Jan 18, 2007
- Hiroshi Osawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Particle remover, exposure apparatus having the same, and device ma...
- Publication number 20060086371
- Publication date Apr 27, 2006
- Akinori Ohkubo
- B08 - CLEANING

Hiroshi Osawa

Person

Patents Grantslast 30 patents

Measurement apparatus for measuring a surface shape of an object ba...

Particle remover, exposure apparatus having the same, and device ma...

Exposure apparatus comprising cleaning apparatus for cleaning mask...

X-ray mask and X-ray exposure method using the same

Positional deviation measuring device and method for measuring the...

Position detecting system

Position detecting apparatus and a method for manufacturing semicon...

Wavelength compensator in a helium ambience

Phase shift device and laser apparatus utilizing the same

Method and apparatus for measuring deviation between patterns on a...

Device for detecting the relative position of first and second objects

Optical head device having a light splitter with a diffraction grat...

Integrated optical head

Optical head device with diffraction grating for separating a light...

Patents Applicationslast 30 patents

MEASUREMENT APPARATUS

MEASUREMENT APPARATUS

CLEANING APPARATUS AND METHOD, EXPOSURE APPARATUS HAVING THE CLEANI...

EXPOSURE APPARATUS

Particle remover, exposure apparatus having the same, and device ma...