Hiroshi OTOMO

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Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230178338
- Publication date Jun 8, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi OTOMO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20230013551
- Publication date Jan 19, 2023
- TOKYO ELECTRON LIMITED
- Hiroshi OTOMO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220020568
- Publication date Jan 20, 2022
- TOKYO ELECTRON LIMITED
- Takahiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS