Hiroshi Oyama

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Yokohama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and exposing method and method of manufacturing...
- Patent number 7,760,328
- Issue date Jul 20, 2010
- Hitachi Via Mechanics, Ltd.
- Yoshihide Yamaguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus and exposing method and method of manufacturing...
- Publication number 20060215143
- Publication date Sep 28, 2006
- Yoshihide Yamaguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR