Hiroshi Sakurai

Follow

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Members for semiconductor manufacturing apparatus and method for pr...
- Patent number 6,805,968
- Issue date Oct 19, 2004
- Tocalo Co., Ltd.
- Yukimasa Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Members for semiconductor manufacturing apparatus and method for pr...
- Publication number 20020192480
- Publication date Dec 19, 2002
- Tokyo, Electron Co.
- Yukimasa Saito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...