Hiroshi Shimomoto

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,541,502
- Issue date Jan 3, 2023
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Method of cleaning a substrate
- Patent number 11,495,475
- Issue date Nov 8, 2022
- Ebara Corporation
- Koji Maeda
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,688,622
- Issue date Jun 23, 2020
- Ebara Corporation
- Hiroshi Aono
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus and substrate processing apparatus
- Patent number 10,573,509
- Issue date Feb 25, 2020
- Ebara Corporation
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus and polishing apparatus
- Patent number 10,096,492
- Issue date Oct 9, 2018
- Ebara Corporation
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 9,842,732
- Issue date Dec 12, 2017
- Ebara Corporation
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 9,704,728
- Issue date Jul 11, 2017
- Ebara Corporation
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid supply method, liquid supply apparatus, substrate polishing...
- Patent number 8,298,369
- Issue date Oct 30, 2012
- Ebara Corporation
- Koji Maeda
- B24 - GRINDING POLISHING
Information Patent Grant
Pure water reusing system
- Patent number 6,508,695
- Issue date Jan 21, 2003
- Ebara Corporation
- Mutsumi Tanikawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing liquid supply apparatus
- Patent number 6,358,125
- Issue date Mar 19, 2002
- Ebara Corporation
- Kiyotaka Kawashima
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210394332
- Publication date Dec 23, 2021
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF CLEANING A SUBSTRATE
- Publication number 20200176281
- Publication date Jun 4, 2020
- EBARA CORPORATION
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180001440
- Publication date Jan 4, 2018
- EBARA CORPORATION
- Hiroshi AONO
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170372893
- Publication date Dec 28, 2017
- EBARA CORPORATION
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20170271178
- Publication date Sep 21, 2017
- EBARA CORPORATION
- Koji MAEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20150017889
- Publication date Jan 15, 2015
- EBARA CORPORATION
- Masao Umemoto
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND POLISHING APPARATUS
- Publication number 20140190530
- Publication date Jul 10, 2014
- EBARA CORPORATION
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND POLISHING APPARATUS
- Publication number 20140190633
- Publication date Jul 10, 2014
- EBARA CORPORATION
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20140116466
- Publication date May 1, 2014
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Liquid supply method, liquid supply apparatus, substrate polishing...
- Publication number 20070221615
- Publication date Sep 27, 2007
- Koji Maeda
- B24 - GRINDING POLISHING
Information Patent Application
Pure water reusing system
- Publication number 20010034190
- Publication date Oct 25, 2001
- Mutsumi Tanikawa
- B24 - GRINDING POLISHING
Information Patent Application
Polishing liquid supply apparatus
- Publication number 20010002361
- Publication date May 31, 2001
- Kiyotaka Kawashima
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Hiroshi Shimomoto

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Method of cleaning a substrate

Substrate processing apparatus

Cleaning apparatus and substrate processing apparatus

Substrate cleaning apparatus and polishing apparatus

Substrate cleaning apparatus and substrate cleaning method

Substrate cleaning apparatus and substrate cleaning method

Liquid supply method, liquid supply apparatus, substrate polishing...

Pure water reusing system

Polishing liquid supply apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

METHOD OF CLEANING A SUBSTRATE

SUBSTRATE PROCESSING APPARATUS

CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

POLISHING APPARATUS

SUBSTRATE CLEANING APPARATUS AND POLISHING APPARATUS

SUBSTRATE CLEANING APPARATUS AND POLISHING APPARATUS

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

Liquid supply method, liquid supply apparatus, substrate polishing...

Pure water reusing system

Polishing liquid supply apparatus