Hiroshi Shimoyama

Person

  • Nirasaki City, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Method for pre-heating probe card

    • Patent number 9,519,022
    • Issue date Dec 13, 2016
    • Tokyo Electron Limited
    • Hiroshi Yamada
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Wafer inspection apparatus

    • Patent number 9,201,115
    • Issue date Dec 1, 2015
    • Tokyo Electron Limited
    • Hiroshi Yamada
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Apparatus for driving placing table

    • Patent number 8,674,712
    • Issue date Mar 18, 2014
    • Tokyo Electron Limited
    • Tsuyoshi Aruga
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Mounting device

    • Patent number 8,113,084
    • Issue date Feb 14, 2012
    • Tokyo Electron Limited
    • Kazuya Yano
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Mounting device

    • Patent number 7,963,513
    • Issue date Jun 21, 2011
    • Tokyo Electron Limited
    • Hiroshi Shimoyama
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Probe apparatus and method for measuring electrical characteristics...

    • Patent number 7,940,065
    • Issue date May 10, 2011
    • Tokyo Electron Limited
    • Kazuya Yano
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents