Hiroshi Shinya

Person

Kumamoto-ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Heat processing apparatus and heat processing method
- Patent number 8,782,918
- Issue date Jul 22, 2014
- Tokyo Electron Limited
- Shigeki Aoki
- F26 - DRYING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,192,796
- Issue date Jun 5, 2012
- Tokyo Electron Limited
- Hiroshi Shinya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Heat processing apparatus and heat processing method
- Patent number 7,980,003
- Issue date Jul 19, 2011
- Tokyo Electron Limited
- Shigeki Aoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,757,626
- Issue date Jul 20, 2010
- Tokyo Electron Limited
- Hiroshi Shinya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate heating method, substrate heating system, and applying de...
- Patent number 7,223,945
- Issue date May 29, 2007
- Tokyo Electron Limited
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heating method, substrate heating system, and applying de...
- Patent number 7,060,939
- Issue date Jun 13, 2006
- Tokyo Electron Limited
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal treatment equipment and thermal treatment method
- Patent number 7,050,710
- Issue date May 23, 2006
- Tokyo Electron Limited
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-pressure dryer and low-pressure drying method
- Patent number 7,024,798
- Issue date Apr 11, 2006
- Toyota Electron Limited
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-pressure dryer and low-pressure drying method
- Patent number 6,986,214
- Issue date Jan 17, 2006
- Tokyo Electron Limited
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-pressure dryer and low-pressure drying method
- Patent number 6,796,054
- Issue date Sep 28, 2004
- Tokyo Electron Limited
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of thermal processing and method of pattern fo...
- Patent number 6,573,031
- Issue date Jun 3, 2003
- Tokyo Electron Limited
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical processing apparatus
- Patent number 5,928,390
- Issue date Jul 27, 1999
- Tokyo Electron Limited
- Hidetami Yaegashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating system and substrate treating method
- Patent number 5,876,280
- Issue date Mar 2, 1999
- Tokyo Electron Limited
- Junichi Kitano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
HEAT PROCESSING APPARATUS AND HEAT PROCESSING METHOD
- Publication number 20110236845
- Publication date Sep 29, 2011
- TOKYO ELECTRON LIMITED
- Shigeki Aoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20110189400
- Publication date Aug 4, 2011
- TOKYO ELECTRON LIMITED
- Hiroshi Shinya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20100221436
- Publication date Sep 2, 2010
- TOKYO ELECTRON LIMITED
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT PROCESSING APPARATUS AND HEAT PROCESSING METHOD
- Publication number 20070169373
- Publication date Jul 26, 2007
- TOKYO ELECTRON LIMITED
- Shigeki Aoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Thermal processing appparatus
- Publication number 20070137556
- Publication date Jun 21, 2007
- TOKYO ELECTRON LIMITED
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20070048449
- Publication date Mar 1, 2007
- TOKYO ELECTRON LIMITED
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate heating method, substrate heating system, and applying de...
- Publication number 20060127593
- Publication date Jun 15, 2006
- TOKYO ELECTRON LIMITED
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low-pressure dryer and low-pressure drying method
- Publication number 20050160619
- Publication date Jul 28, 2005
- TOKYO ELECTRON LIMITED
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal treatment equipment and thermal treatment method
- Publication number 20040245237
- Publication date Dec 9, 2004
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low-pressure dryer and low-pressure drying method
- Publication number 20040216325
- Publication date Nov 4, 2004
- TOKYO ELECTRON LIMITED
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low-pressure dryer and low-pressure drying method
- Publication number 20030172542
- Publication date Sep 18, 2003
- TOKYO ELECTRON LIMITED
- Tomohide Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate heating method, substrate heating system, and applying de...
- Publication number 20030166305
- Publication date Sep 4, 2003
- TOKYO ELECTRON LIMITED
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing apparatus
- Publication number 20030145791
- Publication date Aug 7, 2003
- TOKYO ELECTRON LIMITED
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method of thermal processing and method of pattern fo...
- Publication number 20020076659
- Publication date Jun 20, 2002
- TOKYO ELECTRON LIMITED
- Hiroshi Shinya
- H01 - BASIC ELECTRIC ELEMENTS

Hiroshi Shinya

Person

Patents Grantslast 30 patents

Heat processing apparatus and heat processing method

Substrate processing apparatus and substrate processing method

Heat processing apparatus and heat processing method

Substrate processing apparatus and substrate processing method

Substrate heating method, substrate heating system, and applying de...

Substrate heating method, substrate heating system, and applying de...

Thermal treatment equipment and thermal treatment method

Low-pressure dryer and low-pressure drying method

Low-pressure dryer and low-pressure drying method

Low-pressure dryer and low-pressure drying method

Apparatus and method of thermal processing and method of pattern fo...

Vertical processing apparatus

Substrate treating system and substrate treating method

Patents Applicationslast 30 patents

HEAT PROCESSING APPARATUS AND HEAT PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

HEAT PROCESSING APPARATUS AND HEAT PROCESSING METHOD

Thermal processing appparatus

Substrate processing apparatus and substrate processing method

Substrate heating method, substrate heating system, and applying de...

Low-pressure dryer and low-pressure drying method

Thermal treatment equipment and thermal treatment method

Low-pressure dryer and low-pressure drying method

Low-pressure dryer and low-pressure drying method

Substrate heating method, substrate heating system, and applying de...

Thermal processing apparatus

Apparatus and method of thermal processing and method of pattern fo...