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Hiroshi Shinyashiki
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Saitama-ken, JP
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last 30 patents
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Patent Grant
SOI substrate having monocrystal silicon layer on insulating film
Patent number
5,891,265
Issue date
Apr 6, 1999
Mitsubishi Denki Kabushiki Kaisha
Tetsuya Nakai
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of manufacturing a SOI substrate having a monocrystalline si...
Patent number
5,741,717
Issue date
Apr 21, 1998
Mitsubishi Denki Kabushiki Kaisha
Tetsuya Nakai
H01 - BASIC ELECTRIC ELEMENTS