Hiroshi Shirasu

Person

Yokohama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate bonding apparatus and substrate bonding method
- Patent number 11,791,223
- Issue date Oct 17, 2023
- Nikon Corporation
- Isao Sugaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable body apparatus, pattern forming apparatus and pattern formi...
- Patent number 10,627,725
- Issue date Apr 21, 2020
- Nikon Corporation
- Yasuo Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable body apparatus, pattern forming apparatus and pattern formi...
- Patent number 10,228,625
- Issue date Mar 12, 2019
- Nikon Corporation
- Yasuo Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate bonding apparatus, substrate holding apparatus, substrate...
- Patent number 9,539,800
- Issue date Jan 10, 2017
- Nikon Corporation
- Yoshiaki Kito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable body apparatus, pattern forming apparatus and pattern formi...
- Patent number 9,366,974
- Issue date Jun 14, 2016
- Nikon Corporation
- Yasuo Aoki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Discharge lamp, light source apparatus, exposure apparatus, and exp...
- Patent number 8,704,431
- Issue date Apr 22, 2014
- Nikon Corporation
- Hiroshi Shirasu
- F21 - LIGHTING
Information Patent Grant
Object moving apparatus, object processing apparatus, exposure appa...
- Patent number 8,699,001
- Issue date Apr 15, 2014
- Nikon Corporation
- Yasuo Aoki
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Discharge lamp, light source apparatus, exposure apparatus, and exp...
- Patent number 8,531,093
- Issue date Sep 10, 2013
- Nikon Corporation
- Hiroshi Shirasu
- F21 - LIGHTING
Information Patent Grant
Exposure apparatus, optical projection apparatus and a method for a...
- Patent number 7,372,543
- Issue date May 13, 2008
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Grant
Exposure apparatus, optical projection apparatus and a method for a...
- Patent number 7,372,544
- Issue date May 13, 2008
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Grant
Exposure apparatus, optical projection apparatus and a method for a...
- Patent number 7,023,527
- Issue date Apr 4, 2006
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Grant
Exposure apparatus, method for manufacturing therof, method for exp...
- Patent number 6,811,953
- Issue date Nov 2, 2004
- Nikon Corporation
- Hitoshi Hatada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, optical projection apparatus and a method for a...
- Patent number 6,795,169
- Issue date Sep 21, 2004
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus
- Patent number 6,570,641
- Issue date May 27, 2003
- Nikon Corporation
- Tomohide Hamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure/imaging apparatus and method in which imaging characterist...
- Patent number 6,556,278
- Issue date Apr 29, 2003
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and exposure method for transferring pattern ont...
- Patent number 6,351,305
- Issue date Feb 26, 2002
- Nikon Corporation
- Masahi Tanaka
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus
- Patent number 6,317,196
- Issue date Nov 13, 2001
- Nikon Corporation
- Tomohide Hamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,266,131
- Issue date Jul 24, 2001
- Nikon Corporation
- Tomohide Hamada
- G02 - OPTICS
Information Patent Grant
Exposure apparatus
- Patent number 6,049,372
- Issue date Apr 11, 2000
- Nikon Corporation
- Kinya Kato
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning-type exposure apparatus including a vertically disposed ho...
- Patent number 5,923,409
- Issue date Jul 13, 1999
- Nikon Corporation
- Tomohide Hamada
- G02 - OPTICS
Information Patent Grant
Projection exposure apparatus
- Patent number 5,920,378
- Issue date Jul 6, 1999
- Nikon Corporation
- Masaichi Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,798,822
- Issue date Aug 25, 1998
- Nikon Corporation
- Seiji Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus for reproducing a mask pattern onto a photo-sens...
- Patent number 5,774,240
- Issue date Jun 30, 1998
- Nikon Corporation
- Akihiro Goto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus with light shielding portion for plotosensitive...
- Patent number 5,760,881
- Issue date Jun 2, 1998
- Nikon Corporation
- Seiji Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, optical projection apparatus and a method for a...
- Patent number 5,729,331
- Issue date Mar 17, 1998
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Grant
Scanning exposure apparatus
- Patent number 5,715,037
- Issue date Feb 3, 1998
- Nikon Corporation
- Kazuaki Saiki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Scanning projection exposure method and projection exposure apparatus
- Patent number 5,686,997
- Issue date Nov 11, 1997
- Nikon Corporation
- Hiroshi Shirasu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method
- Patent number 5,657,130
- Issue date Aug 12, 1997
- Nikon Corporation
- Hiroshi Shirasu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and exposure method
- Patent number 5,617,181
- Issue date Apr 1, 1997
- Nikon Corporation
- Masamitsu Yanagihara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-beam scanning projection exposure apparatus and method with b...
- Patent number 5,581,075
- Issue date Dec 3, 1996
- Nikon Corporation
- Tsuyoshi Naraki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE BONDING APPARATUS AND SUBSTRATE BONDING METHOD
- Publication number 20240014079
- Publication date Jan 11, 2024
- Nikon Corporation
- Isao SUGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVABLE BODY APPARATUS, PATTERN FORMING APPARATUS AND PATTERN FORMI...
- Publication number 20200225589
- Publication date Jul 16, 2020
- Nikon Corporation
- Yasuo AOKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOVABLE BODY APPARATUS, PATTERN FORMING APPARATUS AND PATTERN FORMI...
- Publication number 20190155176
- Publication date May 23, 2019
- Nikon Corporation
- Yasuo AOKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE BONDING APPARATUS AND SUBSTRATE BONDING METHOD
- Publication number 20180308770
- Publication date Oct 25, 2018
- Nikon Corporation
- Isao SUGAYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVABLE BODY APPARATUS, PATTERN FORMING APPARATUS AND PATTERN FORMI...
- Publication number 20160259255
- Publication date Sep 8, 2016
- Nikon Corporation
- Yasuo AOKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE BONDING APPARATUS, SUBSTRATE HOLDING APPARATUS, SUBSTRATE...
- Publication number 20140072774
- Publication date Mar 13, 2014
- Yoshiaki KITO
- B32 - LAYERED PRODUCTS
Information Patent Application
DISCHARGE LAMP, LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS, AND EXP...
- Publication number 20120248960
- Publication date Oct 4, 2012
- NIKON CORPORATION
- Hiroshi SHIRASU
- F21 - LIGHTING
Information Patent Application
Vibration control apparatus, vibration control method, exposure app...
- Publication number 20110085152
- Publication date Apr 14, 2011
- Hideaki Nishino
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT PROCESSING APPARATUS, EXPOSURE APPARATUS AND EXPOSURE METHOD...
- Publication number 20110042874
- Publication date Feb 24, 2011
- Nikon Corporation
- Yasuo AOKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT MOVING APPARATUS, OBJECT PROCESSING APPARATUS, EXPOSURE APPA...
- Publication number 20110043784
- Publication date Feb 24, 2011
- Nikon Corporation
- Yasuo AOKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTERMEDIATE VACUUM SEAL ASSEMBLY FOR SEALING A CHAMBER HOUSING TO...
- Publication number 20100245795
- Publication date Sep 30, 2010
- Fardad A. Hashemi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MOVABLE BODY APPARATUS, PATTERN FORMING APPARATUS AND PATTERN FORMI...
- Publication number 20100018950
- Publication date Jan 28, 2010
- Nikon Corporation
- Yasuo AOKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Discharge lamp, light source apparatus, exposure apparatus, and exp...
- Publication number 20080218049
- Publication date Sep 11, 2008
- Hiroshi Shirasu
- F21 - LIGHTING
Information Patent Application
Exposure apparatus, optical projection apparatus and a method for a...
- Publication number 20080192216
- Publication date Aug 14, 2008
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Application
Exposure apparatus, optical projection apparatus and a method for a...
- Publication number 20070216885
- Publication date Sep 20, 2007
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Application
Exposure apparatus, optical projection apparatus and a method for a...
- Publication number 20060238729
- Publication date Oct 26, 2006
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Application
Exposure apparatus, optical projection apparatus and a method for a...
- Publication number 20050012917
- Publication date Jan 20, 2005
- Nikon Corporation
- Masashi Tanaka
- G02 - OPTICS
Information Patent Application
Exposure apparatus, optical projection apparatus and a method for a...
- Publication number 20030137644
- Publication date Jul 24, 2003
- NIKON CORPORATION
- Masashi Tanaka
- G02 - OPTICS
Information Patent Application
Projection exposure apparatus
- Publication number 20020021431
- Publication date Feb 21, 2002
- NIKON CORPORATION
- Tomohide Hamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, method for manufacturing thereof, method for ex...
- Publication number 20020005940
- Publication date Jan 17, 2002
- Nikon Corporation
- Hitoshi Hatada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hiroshi Shirasu

Person

Patents Grantslast 30 patents

Substrate bonding apparatus and substrate bonding method

Movable body apparatus, pattern forming apparatus and pattern formi...

Movable body apparatus, pattern forming apparatus and pattern formi...

Substrate bonding apparatus, substrate holding apparatus, substrate...

Movable body apparatus, pattern forming apparatus and pattern formi...

Discharge lamp, light source apparatus, exposure apparatus, and exp...

Object moving apparatus, object processing apparatus, exposure appa...

Discharge lamp, light source apparatus, exposure apparatus, and exp...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure apparatus, method for manufacturing therof, method for exp...

Exposure apparatus, optical projection apparatus and a method for a...

Projection exposure apparatus

Exposure/imaging apparatus and method in which imaging characterist...

Exposure apparatus and exposure method for transferring pattern ont...

Projection exposure apparatus

Exposure apparatus

Exposure apparatus

Scanning-type exposure apparatus including a vertically disposed ho...

Projection exposure apparatus

Exposure apparatus

Exposure apparatus for reproducing a mask pattern onto a photo-sens...

Exposure apparatus with light shielding portion for plotosensitive...

Exposure apparatus, optical projection apparatus and a method for a...

Scanning exposure apparatus

Scanning projection exposure method and projection exposure apparatus

Exposure apparatus and method

Exposure apparatus and exposure method

Multi-beam scanning projection exposure apparatus and method with b...

Patents Applicationslast 30 patents

SUBSTRATE BONDING APPARATUS AND SUBSTRATE BONDING METHOD

MOVABLE BODY APPARATUS, PATTERN FORMING APPARATUS AND PATTERN FORMI...

MOVABLE BODY APPARATUS, PATTERN FORMING APPARATUS AND PATTERN FORMI...

SUBSTRATE BONDING APPARATUS AND SUBSTRATE BONDING METHOD

MOVABLE BODY APPARATUS, PATTERN FORMING APPARATUS AND PATTERN FORMI...

SUBSTRATE BONDING APPARATUS, SUBSTRATE HOLDING APPARATUS, SUBSTRATE...

DISCHARGE LAMP, LIGHT SOURCE APPARATUS, EXPOSURE APPARATUS, AND EXP...

Vibration control apparatus, vibration control method, exposure app...

OBJECT PROCESSING APPARATUS, EXPOSURE APPARATUS AND EXPOSURE METHOD...

OBJECT MOVING APPARATUS, OBJECT PROCESSING APPARATUS, EXPOSURE APPA...

INTERMEDIATE VACUUM SEAL ASSEMBLY FOR SEALING A CHAMBER HOUSING TO...

MOVABLE BODY APPARATUS, PATTERN FORMING APPARATUS AND PATTERN FORMI...

Discharge lamp, light source apparatus, exposure apparatus, and exp...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure apparatus, optical projection apparatus and a method for a...

Exposure apparatus, optical projection apparatus and a method for a...

Projection exposure apparatus

Exposure apparatus, method for manufacturing thereof, method for ex...