Hiroshi Sogabe

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Ehime, JP

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Patents Grantslast 30 patents

Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 7,851,772
- Issue date Dec 14, 2010
- Sen Corporation an SHI and Axcelis Company
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Irradiation system with ion beam
- Patent number 7,351,987
- Issue date Apr 1, 2008
- SEN Corporation, an SHI and Axcelis Company
- Mitsuaki Kabasawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer charge compensation device and ion implantation system having...
- Patent number 7,304,319
- Issue date Dec 4, 2007
- SEN Corporation, an SHI and Axcelis Company
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for operating a variable aperture in an ion impla...
- Patent number 6,194,734
- Issue date Feb 27, 2001
- Axcelis Technologies, Inc.
- Paul A. Loomis
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD
- Publication number 20080251713
- Publication date Oct 16, 2008
- SEN Corporation, an SHI and Axcelis Company
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer charge compensation device and ion implantation system having...
- Publication number 20060113492
- Publication date Jun 1, 2006
- SUMITOMO EATON NOVA CORPORATION
- Hiroshi Kawaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Irradiation system with ion beam
- Publication number 20060113466
- Publication date Jun 1, 2006
- Mitsuaki Kabasawa
- H01 - BASIC ELECTRIC ELEMENTS