Hiroshi Someya

Person

Hiratsuka-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Optical apparatus
- Patent number 11,428,892
- Issue date Aug 30, 2022
- Gigaphoton Inc.
- Hiroshi Someya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target supply device, target supply method, and electronic device m...
- Patent number 11,320,740
- Issue date May 3, 2022
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure of connection between optical unit and optical path tube
- Patent number 10,481,354
- Issue date Nov 19, 2019
- Gigaphoton Inc.
- Yukio Watanabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light sensor unit and extreme ultraviolet light...
- Patent number 10,485,085
- Issue date Nov 19, 2019
- Gigaphoton Inc.
- Hisashi Nara
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Gas lock device and extreme ultraviolet light generation apparatus
- Patent number 9,253,866
- Issue date Feb 2, 2016
- Gigaphoton Inc.
- Hiroshi Someya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device
- Patent number 9,233,782
- Issue date Jan 12, 2016
- Gigaphoton Inc.
- Takanobu Ishihara
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Mirror device
- Patent number 9,229,192
- Issue date Jan 5, 2016
- Gigaphoton Inc.
- Hiroshi Someya
- G02 - OPTICS
Information Patent Grant
Mirror device
- Patent number 9,046,651
- Issue date Jun 2, 2015
- Gigaphoton Inc.
- Hiroshi Someya
- G02 - OPTICS
Information Patent Grant
Collector mirror exchanging apparatus and method for extreme ultrav...
- Patent number 8,804,902
- Issue date Aug 12, 2014
- Gigaphoton Inc.
- Hiroshi Someya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Target supply device
- Patent number 8,779,402
- Issue date Jul 15, 2014
- Gigaphoton Inc.
- Takayuki Yabu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Method and apparatus for cleaning collector mirror in EUV light gen...
- Patent number 8,536,550
- Issue date Sep 17, 2013
- Gigaphoton Inc.
- Takeshi Asayama
- B08 - CLEANING
Information Patent Grant
Collector mirror exchanging apparatus and method for extreme ultrav...
- Patent number 8,477,412
- Issue date Jul 2, 2013
- Gigaphoton Inc.
- Hiroshi Someya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,450,706
- Issue date May 28, 2013
- Gigaphoton Inc.
- Tamotsu Abe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus and target supply device
- Patent number 8,445,877
- Issue date May 21, 2013
- Gigaphoton Inc.
- Hiroshi Someya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,294,129
- Issue date Oct 23, 2012
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Differential evacuation system
- Patent number 8,258,492
- Issue date Sep 4, 2012
- Gigaphoton Inc.
- Hiroshi Someya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,212,228
- Issue date Jul 3, 2012
- Komatsu Ltd.
- Tamotsu Abe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,173,984
- Issue date May 8, 2012
- Komatsu Ltd.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus and nozzle protection de...
- Patent number 8,003,962
- Issue date Aug 23, 2011
- Gigaphoton Inc.
- Hiroshi Someya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 7,923,705
- Issue date Apr 12, 2011
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 7,880,153
- Issue date Feb 1, 2011
- Komatsu Ltd.
- Takashi Suganuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 7,683,355
- Issue date Mar 23, 2010
- Komatsu Ltd.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...
- Publication number 20210364927
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL APPARATUS
- Publication number 20210103118
- Publication date Apr 8, 2021
- Gigaphoton Inc.
- Hiroshi SOMEYA
- G02 - OPTICS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SENSOR UNIT AND EXTREME ULTRAVIOLET LIGHT...
- Publication number 20190021159
- Publication date Jan 17, 2019
- Gigaphoton Inc.
- Hisashi NARA
- G02 - OPTICS
Information Patent Application
STRUCTURE OF CONNECTION BETWEEN OPTICAL UNIT AND OPTICAL PATH TUBE
- Publication number 20180341077
- Publication date Nov 29, 2018
- Gigaphoton Inc.
- Yukio WATANABE
- G02 - OPTICS
Information Patent Application
MIRROR DEVICE
- Publication number 20150226935
- Publication date Aug 13, 2015
- GIGAPHOTON INC.
- Hiroshi Someya
- G02 - OPTICS
Information Patent Application
GAS LOCK DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20140216576
- Publication date Aug 7, 2014
- GIGAPHOTON INC.
- Hiroshi SOMEYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GEN...
- Publication number 20140166046
- Publication date Jun 19, 2014
- GIGAPHOTON INC.
- Takeshi Asayama
- B08 - CLEANING
Information Patent Application
TARGET SUPPLY DEVICE
- Publication number 20130240645
- Publication date Sep 19, 2013
- Gigaphoton Inc.
- Takanobu Ishihara
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
COLLECTOR MIRROR EXCHANGING APPARATUS AND METHOD FOR EXTREME ULTRAV...
- Publication number 20130221247
- Publication date Aug 29, 2013
- GIGAPHOTON INC.
- Hiroshi Someya
- B82 - NANO-TECHNOLOGY
Information Patent Application
TARGET SUPPLY DEVICE
- Publication number 20130206863
- Publication date Aug 15, 2013
- GIGAPHOTON INC.
- Takayuki YABU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MIRROR DEVICE
- Publication number 20130050862
- Publication date Feb 28, 2013
- GIGAPHOTON INC.
- Hiroshi Someya
- G02 - OPTICS
Information Patent Application
EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS
- Publication number 20120228527
- Publication date Sep 13, 2012
- Komatsu Ltd./Gigaphoton, Inc.
- Tamotsu ABE
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM
- Publication number 20120119118
- Publication date May 17, 2012
- GIGAPHOTON INC.
- Yukio WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS
- Publication number 20110180734
- Publication date Jul 28, 2011
- GIGAPHOTON INC.
- Masato MORIYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND NOZZLE PROTECTION DE...
- Publication number 20110174996
- Publication date Jul 21, 2011
- Gigaphoton, Inc
- Hiroshi SOMEYA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM
- Publication number 20100193711
- Publication date Aug 5, 2010
- Yukio WATANABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Differential evacuation system
- Publication number 20100181498
- Publication date Jul 22, 2010
- Komatsu Ltd.
- Hiroshi Someya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultra violet light source apparatus
- Publication number 20100176310
- Publication date Jul 15, 2010
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultraviolet light source apparatus
- Publication number 20100171049
- Publication date Jul 8, 2010
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultraviolet light source apparatus and nozzle protection de...
- Publication number 20100019173
- Publication date Jan 28, 2010
- Hiroshi Someya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GEN...
- Publication number 20090301517
- Publication date Dec 10, 2009
- Komatsu Ltd.
- Takeshi Asayama
- B08 - CLEANING
Information Patent Application
Exreme ultraviolet light source apparatus
- Publication number 20090272919
- Publication date Nov 5, 2009
- Tamotsu Abe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultra violet light source apparatus
- Publication number 20090224181
- Publication date Sep 10, 2009
- Tamotsu Abe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Extreme ultra violet light source apparatus
- Publication number 20080210889
- Publication date Sep 4, 2008
- Takashi Suganuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Collector mirror exchanging apparatus and method for extreme ultrav...
- Publication number 20080104828
- Publication date May 8, 2008
- Hiroshi Someya
- G02 - OPTICS
Information Patent Application
Extreme ultra violet light source apparatus
- Publication number 20080073598
- Publication date Mar 27, 2008
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Hiroshi Someya

Person

Patents Grantslast 30 patents

Optical apparatus

Target supply device, target supply method, and electronic device m...

Structure of connection between optical unit and optical path tube

Extreme ultraviolet light sensor unit and extreme ultraviolet light...

Gas lock device and extreme ultraviolet light generation apparatus

Target supply device

Mirror device

Mirror device

Collector mirror exchanging apparatus and method for extreme ultrav...

Target supply device

Method and apparatus for cleaning collector mirror in EUV light gen...

Collector mirror exchanging apparatus and method for extreme ultrav...

Extreme ultraviolet light source apparatus

Extreme ultraviolet light source apparatus and target supply device

Extreme ultraviolet light source apparatus

Differential evacuation system

Extreme ultra violet light source apparatus

Extreme ultraviolet light source apparatus

Extreme ultraviolet light source apparatus and nozzle protection de...

Extreme ultra violet light source apparatus

Extreme ultra violet light source apparatus

Extreme ultra violet light source apparatus

Patents Applicationslast 30 patents

TARGET SUPPLY DEVICE, TARGET SUPPLY METHOD, AND ELECTRONIC DEVICE M...

OPTICAL APPARATUS

EXTREME ULTRAVIOLET LIGHT SENSOR UNIT AND EXTREME ULTRAVIOLET LIGHT...

STRUCTURE OF CONNECTION BETWEEN OPTICAL UNIT AND OPTICAL PATH TUBE

MIRROR DEVICE

GAS LOCK DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS

METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GEN...

TARGET SUPPLY DEVICE

COLLECTOR MIRROR EXCHANGING APPARATUS AND METHOD FOR EXTREME ULTRAV...

TARGET SUPPLY DEVICE

MIRROR DEVICE

EXTREME ULTRA VIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS

EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS AND NOZZLE PROTECTION DE...

EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM

Differential evacuation system

Extreme ultra violet light source apparatus

Extreme ultraviolet light source apparatus

Extreme ultraviolet light source apparatus and nozzle protection de...

METHOD AND APPARATUS FOR CLEANING COLLECTOR MIRROR IN EUV LIGHT GEN...

Exreme ultraviolet light source apparatus

Extreme ultra violet light source apparatus

Extreme ultra violet light source apparatus

Collector mirror exchanging apparatus and method for extreme ultrav...

Extreme ultra violet light source apparatus