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Hiroshi SONE

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  • Nirasaki City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Mounting table structure, substrate processing apparatus, and metho...
    • Patent number 12,315,707
    • Issue date May 27, 2025
    • Tokyo Electron Limited
    • Motoi Yamagata
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming apparatus
    • Patent number 11,551,918
    • Issue date Jan 10, 2023
    • Tokyo Electron Limited
    • Kenichi Imakita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering device
    • Patent number 11,414,747
    • Issue date Aug 16, 2022
    • Tokyo Electron Limited
    • Junichi Takei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Stage mechanism, processing apparatus, and method of operating the...
    • Patent number 11,282,733
    • Issue date Mar 22, 2022
    • Tokyo Electron Limited
    • Yuuki Motomura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    PVD processing method and PVD processing apparatus
    • Patent number 11,193,200
    • Issue date Dec 7, 2021
    • Tokyo Electron Limited
    • Koji Maeda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Sputtering apparatus
    • Patent number 11,149,342
    • Issue date Oct 19, 2021
    • Tokyo Electron Limited
    • Junichi Takei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 10,748,750
    • Issue date Aug 18, 2020
    • Tokyo Electron Limited
    • Hiroaki Chihaya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus of processing workpiece in depressurized space
    • Patent number 10,381,258
    • Issue date Aug 13, 2019
    • Tokyo Electron Limited
    • Takuya Umise
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Deposition device and deposition method
    • Patent number 10,309,005
    • Issue date Jun 4, 2019
    • Tokyo Electron Limited
    • Yasuhiko Kojima
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Fixing unit of plate-shaped member, PVD processing apparatus and fi...
    • Patent number 10,254,693
    • Issue date Apr 9, 2019
    • Tokyo Electron Limited
    • Hiroyuki Yokohara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Substrate Processing Apparatus
    • Publication number 20250232963
    • Publication date Jul 17, 2025
    • TOKYO ELECTRON LIMITED
    • Motoi YAMAGATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate Processing Apparatus
    • Publication number 20250174441
    • Publication date May 29, 2025
    • TOKYO ELECTRON LIMITED
    • Naoya FUKUDA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate Processing Apparatus
    • Publication number 20250125132
    • Publication date Apr 17, 2025
    • TOKYO ELECTRON LIMITED
    • Naoki KUBOTA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20250122625
    • Publication date Apr 17, 2025
    • TOKYO ELECTRON LIMITED
    • Motoi YAMAGATA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20240209509
    • Publication date Jun 27, 2024
    • TOKYO ELECTRON LIMITED
    • Naoya FUKUDA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
    • Publication number 20230249306
    • Publication date Aug 10, 2023
    • TOKYO ELECTRON LIMITED
    • Yusuke KIKUCHI
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    MOUNTING TABLE STRUCTURE, SUBSTRATE PROCESSING APPARATUS, AND METHO...
    • Publication number 20220238314
    • Publication date Jul 28, 2022
    • TOKYO ELECTRON LIMITED
    • Motoi YAMAGATA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MOUNTING TABLE AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20220189813
    • Publication date Jun 16, 2022
    • TOKYO ELECTRON LIMITED
    • Katsuyoshi AIKAWA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20220098717
    • Publication date Mar 31, 2022
    • TOKYO ELECTRON LIMITED
    • Kenichi IMAKITA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTER DEVICE
    • Publication number 20210262080
    • Publication date Aug 26, 2021
    • TOKYO ELECTRON LIMITED
    • Junichi TAKEI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20200381226
    • Publication date Dec 3, 2020
    • TOKYO ELECTRON LIMITED
    • Kenichi IMAKITA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20200255935
    • Publication date Aug 13, 2020
    • TOKYO ELECTRON LIMITED
    • Junichi Takei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    STAGE MECHANISM, PROCESSING APPARATUS, AND METHOD OF OPERATING THE...
    • Publication number 20200035537
    • Publication date Jan 30, 2020
    • TOKYO ELECTRON LIMITED
    • Yuuki MOTOMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE STAGE AND FILM FORMING APPARATUS
    • Publication number 20190390326
    • Publication date Dec 26, 2019
    • TOKYO ELECTRON LIMITED
    • Junichi Takei
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING DEVICE
    • Publication number 20190390325
    • Publication date Dec 26, 2019
    • TOKYO ELECTRON LIMITED
    • Junichi TAKEI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PVD PROCESSING METHOD AND PVD PROCESSING APPARATUS
    • Publication number 20190169737
    • Publication date Jun 6, 2019
    • TOKYO ELECTRON LIMITED
    • Koji Maeda
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20190172690
    • Publication date Jun 6, 2019
    • TOKYO ELECTRON LIMITED
    • Hiroaki CHIHAYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUS OF PROCESSING WORKPIECE IN DEPRESSURIZED SPACE
    • Publication number 20170162424
    • Publication date Jun 8, 2017
    • TOKYO ELECTRON LIMITED
    • Takuya UMISE
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DEPOSITION DEVICE AND DEPOSITION METHOD
    • Publication number 20160251746
    • Publication date Sep 1, 2016
    • Tokyo Electron Limited
    • Yasuhiko KOJIMA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FIXING UNIT OF PLATE-SHAPED MEMBER, PVD PROCESSING APPARATUS AND FI...
    • Publication number 20150370204
    • Publication date Dec 24, 2015
    • TOKYO ELECTRON LIMITED
    • Hiroyuki YOKOHARA
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY