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Hiroshi Sugahara
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Hyogo, JP
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last 30 patents
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Patent Grant
Wet etching method using ultraviolet-light and method of manufactur...
Patent number
7,935,266
Issue date
May 3, 2011
Renesas Electronics Corporation
Satoshi Kume
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
WET ETCHING METHOD USING ULTRAVIOLET LIGHT AND METHOD OF MANUFACTUR...
Publication number
20080113518
Publication date
May 15, 2008
Renesas Technology Corp.
Satoshi Kume
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Wet etching apparatus and wet etching method
Publication number
20050205521
Publication date
Sep 22, 2005
Semiconductor Leading Edge Technologies, Inc.
Satsohi Kume
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ultraviolet-light radiating apparatus, wet etching apparatus and we...
Publication number
20040209194
Publication date
Oct 21, 2004
Semiconductor Leading Edge Technologies, Inc.
Satoshi Kume
H01 - BASIC ELECTRIC ELEMENTS