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Hiroshi Suzuki

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma etching method
    • Patent number 8,821,742
    • Issue date Sep 2, 2014
    • Tokyo Electron Limited
    • Ryoichi Yoshida
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA ETCHING APPARATUS
    • Publication number 20100133234
    • Publication date Jun 3, 2010
    • TOKYO ELECTRON LIMITED
    • Ryoichi Yoshida
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma etching apparatus
    • Publication number 20060042754
    • Publication date Mar 2, 2006
    • TOKYO ELECTRON LIMITED
    • Ryoichi Yoshida
    • H01 - BASIC ELECTRIC ELEMENTS