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Hiroshi Takita
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Kawasaki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Preparing data for hybrid exposure using both electron beam exposur...
Patent number
8,141,009
Issue date
Mar 20, 2012
Fujitsu Semiconductor Limited
Masaaki Miyajima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Layout determination method, method of manufacturing semiconductor...
Patent number
7,587,703
Issue date
Sep 8, 2009
Fujitsu Microelectronics Limited
Hiroshi Takita
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for correcting electron beam exposure data
Patent number
7,569,842
Issue date
Aug 4, 2009
Fujitsu Microelectronics Limited
Hiroshi Takita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Block mask making method, block mask and exposure apparatus
Patent number
6,821,685
Issue date
Nov 23, 2004
Fujitsu Limited
Hiroshi Takita
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR PREPARING DATA FOR EXPOSURE AND METHOD FOR MANUFACTURING...
Publication number
20090239160
Publication date
Sep 24, 2009
Fujitsu Microelectronics Limited
Masaaki MIYAJIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Layout determination method, method of manufacturing semiconductor...
Publication number
20070226672
Publication date
Sep 27, 2007
FUJITSU LIMITED
Hiroshi Takita
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method for correcting electron beam exposure data
Publication number
20060284120
Publication date
Dec 21, 2006
FUJITSU LIMITED
Hiroshi Takita
B82 - NANO-TECHNOLOGY
Information
Patent Application
Block mask making method, block mask and exposure apparatus
Publication number
20030003375
Publication date
Jan 2, 2003
FUJITSU LIMITED
Hiroshi Takita
H01 - BASIC ELECTRIC ELEMENTS