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Hiroshi Takizawa
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Toyohashi-shi, JP
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last 30 patents
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Patent Grant
Port structure in semiconductor processing system
Patent number
7,279,067
Issue date
Oct 9, 2007
Tokyo Electron Limited
Tetsuo Yoshida
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Port structure in semiconductor processing system
Publication number
20050103270
Publication date
May 19, 2005
TOKYO ELECTRON LIMITED
Tetsuo Yoshida
H01 - BASIC ELECTRIC ELEMENTS