Hiroshi Tooyama

Person

Hachioji, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,952,074
- Issue date May 31, 2011
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,417,444
- Issue date Aug 26, 2008
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam application system
- Patent number 7,408,760
- Issue date Aug 5, 2008
- Hitachi High-Technologies Corporation
- Sayaka Tanimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 7,026,830
- Issue date Apr 11, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 6,559,663
- Issue date May 6, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 6,329,826
- Issue date Dec 11, 2001
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting integrated circuit pattern
- Patent number 6,172,363
- Issue date Jan 9, 2001
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Grant
Surface metrological apparatus
- Patent number 5,001,409
- Issue date Mar 19, 1991
- Hitachi, Ltd.
- Sumio Hosaka
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Device for optically tracking information
- Patent number 4,541,082
- Issue date Sep 10, 1985
- Hitachi, Ltd.
- Tatsuo Horikoshi
- G11 - INFORMATION STORAGE

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN
- Publication number 20080302964
- Publication date Dec 11, 2008
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam application system
- Publication number 20060056131
- Publication date Mar 16, 2006
- Sayaka Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for inspecting integrated circuit pattern
- Publication number 20060043982
- Publication date Mar 2, 2006
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting integrated circuit pattern
- Publication number 20030169060
- Publication date Sep 11, 2003
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for inspecting integrated circuit pattern
- Publication number 20020027440
- Publication date Mar 7, 2002
- Hitachi, Ltd.
- Hiroyuki Shinada
- G01 - MEASURING TESTING

Hiroshi Tooyama

Person

Patents Grantslast 30 patents

Method and apparatus for inspecting integrated circuit pattern

Method and apparatus for inspecting integrated circuit pattern

Charged particle beam application system

Method and apparatus for inspecting integrated circuit pattern

Method and apparatus for inspecting integrated circuit pattern

Method and apparatus for inspecting integrated circuit pattern

Method and apparatus for inspecting integrated circuit pattern

Surface metrological apparatus

Device for optically tracking information

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR INSPECTING INTEGRATED CIRCUIT PATTERN

Charged particle beam application system

Method and apparatus for inspecting integrated circuit pattern

Method and apparatus for inspecting integrated circuit pattern

Method and apparatus for inspecting integrated circuit pattern