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Hiroshi Torii
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Tachikawa-shi, JP
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last 30 patents
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Patent Grant
Substrate holder, deposition method using substrate holder, hard di...
Patent number
7,927,473
Issue date
Apr 19, 2011
Canon Anelva Corporation
Shinya Houman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
SPUTTER DEVICE AND METHOD OF MANUFACTURING MAGNETIC STORAGE MEDIUM
Publication number
20110290638
Publication date
Dec 1, 2011
Canon ANELVA Corporation
Hiroshi Torii
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE HOLDER, DEPOSITION METHOD USING SUBSTRATE HOLDER, HARD DI...
Publication number
20100189912
Publication date
Jul 29, 2010
Canon ANELVA Corporation
Shinya Houman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...