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Hiroshi Tsuchiya
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Nirasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and control method thereof
Patent number
7,682,982
Issue date
Mar 23, 2010
Tokyo Electron Limited
Naoto Sagae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
7,504,040
Issue date
Mar 17, 2009
Tokyo Electron Limited
Etsuo Iijima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
6,074,518
Issue date
Jun 13, 2000
Tokyo Electron Limited
Kosuke Imafuku
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma etching method
Patent number
5,716,534
Issue date
Feb 10, 1998
Tokyo Electron Limited
Hiroshi Tsuchiya
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
Publication number
20090242128
Publication date
Oct 1, 2009
TOKYO ELECTRON LIMITED
Kenji TAGO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND CONTROL METHOD THEREOF
Publication number
20080179005
Publication date
Jul 31, 2008
TOKYO ELECTRON LIMITED
Naoto Sagae
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing apparatus and control method thereof
Publication number
20050205208
Publication date
Sep 22, 2005
TOKYO ELECTRON LIMITED
Naoto Sagae
H01 - BASIC ELECTRIC ELEMENTS