Hiroshi Tsuchiya

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Yongin-city, KR

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Patents Applicationslast 30 patents

Information Patent Application
ANNULAR ASSEMBLY FOR PLASMA PROCESSING, PLASMA PROCESSING APPARATUS...
- Publication number 20090229759
- Publication date Sep 17, 2009
- TOKYO ELECTRON LIMITED
- Masahiro OGASAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing apparatus and plasma processing method
- Publication number 20070148364
- Publication date Jun 28, 2007
- TOKYO ELECTRON LIMITED
- Etsuo Iijima
- H01 - BASIC ELECTRIC ELEMENTS