Hiroshi TSUNEMATSU

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Kawasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Sputter apparatus, control device for sputter apparatus and film fo...
- Patent number 9,175,379
- Issue date Nov 3, 2015
- Canon Anelva Corporation
- Yoshinori Nagamine
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SPUTTER APPARATUS, CONTROL DEVICE FOR SPUTTER APPARATUS AND FILM FO...
- Publication number 20130161182
- Publication date Jun 27, 2013
- Canon ANELVA Corporation
- Yoshinori NAGAMINE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...