Hiroshi UMEDA

Person

Oyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
High voltage pulse generation device, gas laser apparatus, and elec...
- Patent number 12,166,329
- Issue date Dec 10, 2024
- National University Corporation Nagaoka University of Technology
- Weihua Jiang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser system
- Patent number 10,290,992
- Issue date May 14, 2019
- Gigaphoton Inc.
- Hiroshi Umeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser device
- Patent number 10,103,509
- Issue date Oct 16, 2018
- Gigaphoton Inc.
- Kouji Kakizaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser device and condenser
- Patent number 10,096,966
- Issue date Oct 9, 2018
- Gigaphoton Inc.
- Akira Suwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 9,991,665
- Issue date Jun 5, 2018
- Gigaphoton Inc.
- Hiroshi Umeda
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation device
- Patent number 9,961,755
- Issue date May 1, 2018
- Gigaphoton Inc.
- Hiroshi Umeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser system
- Patent number 9,806,490
- Issue date Oct 31, 2017
- Gigaphoton Inc.
- Hiroshi Umeda
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser chamber
- Patent number 9,742,141
- Issue date Aug 22, 2017
- Gigaphoton Inc.
- Hiroaki Tsushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme ultraviolet light generation apparatus including target dro...
- Patent number 9,699,877
- Issue date Jul 4, 2017
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device and EUV light generation chamber
- Patent number 9,125,285
- Issue date Sep 1, 2015
- Gigaphoton Inc.
- Hiroshi Umeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device and extreme ultraviolet light generation appar...
- Patent number 8,993,987
- Issue date Mar 31, 2015
- Gigaphoton Inc.
- Hiroshi Umeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device
- Patent number 8,927,951
- Issue date Jan 6, 2015
- Gigaphoton Inc.
- Hiroshi Umeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device
- Patent number 8,921,815
- Issue date Dec 30, 2014
- Gigaphoton Inc.
- Hiroshi Umeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply device and extreme ultraviolet light generation appar...
- Patent number 8,872,126
- Issue date Oct 28, 2014
- Gigaphoton Inc.
- Hiroshi Umeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply unit and extreme ultraviolet light generation apparatus
- Patent number 8,809,819
- Issue date Aug 19, 2014
- Gigaphoton Inc.
- Takayuki Yabu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply apparatus, chamber, and extreme ultraviolet light gen...
- Patent number 8,785,895
- Issue date Jul 22, 2014
- Gigaphoton Inc.
- Hiroshi Umeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240405501
- Publication date Dec 5, 2024
- Gigaphoton Inc.
- Youichi YAMANOUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER OF GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
- Publication number 20240405497
- Publication date Dec 5, 2024
- Gigaphoton Inc.
- Yoichi SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240396284
- Publication date Nov 28, 2024
- Gigaphoton Inc.
- Takeshi UEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20240339797
- Publication date Oct 10, 2024
- Gigaphoton Inc.
- Yoichi SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
- Publication number 20230268710
- Publication date Aug 24, 2023
- Gigaphoton Inc.
- Youichi YAMANOUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH VOLTAGE PULSE GENERATION DEVICE, GAS LASER APPARATUS, AND ELEC...
- Publication number 20210367393
- Publication date Nov 25, 2021
- National University Corporation Nagaoka University of Technology
- Weihua JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-VOLTAGE PULSE GENERATOR, GAS LASER APPARATUS, AND METHOD FOR M...
- Publication number 20210367394
- Publication date Nov 25, 2021
- National University Corporation Nagaoka University of Technology
- Weihua JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE
- Publication number 20210167568
- Publication date Jun 3, 2021
- Gigaphoton Inc.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS
- Publication number 20190252846
- Publication date Aug 15, 2019
- National University Corporation Nagaoka University of Technology
- Weihua JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE
- Publication number 20190148905
- Publication date May 16, 2019
- Gigaphoton Inc.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER SYSTEM
- Publication number 20180191124
- Publication date Jul 5, 2018
- Gigaphoton Inc.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXCIMER LASER DEVICE
- Publication number 20180102622
- Publication date Apr 12, 2018
- Gigaphoton Inc.
- Kouji KAKIZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER SYSTEM
- Publication number 20180013258
- Publication date Jan 11, 2018
- Gigaphoton Inc.
- Hiroshi UMEDA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PULSE POWER MODULE
- Publication number 20170338033
- Publication date Nov 23, 2017
- Gigaphoton Inc.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS
- Publication number 20170338618
- Publication date Nov 23, 2017
- National University Corporation Nagaoka University of Technology
- Weihua JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
- Publication number 20170231075
- Publication date Aug 10, 2017
- Gigaphoton Inc.
- Hiroshi UMEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER SYSTEM
- Publication number 20170070023
- Publication date Mar 9, 2017
- Gigaphoton Inc.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE AND CONDENSER
- Publication number 20170033527
- Publication date Feb 2, 2017
- Gigaphoton Inc.
- Akira SUWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER CHAMBER
- Publication number 20160365696
- Publication date Dec 15, 2016
- Gigaphoton Inc.
- Hiroaki TSUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND CONTROL METHOD F...
- Publication number 20160227638
- Publication date Aug 4, 2016
- Gigaphoton Inc.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPAR...
- Publication number 20140239203
- Publication date Aug 28, 2014
- GIGAPHOTON INC.
- Hiroshi UMEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE AND EUV LIGHT GENERATION CHAMBER
- Publication number 20140209819
- Publication date Jul 31, 2014
- GIGAPHOTON INC.
- Hiroshi UMEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE
- Publication number 20140138560
- Publication date May 22, 2014
- GIGAPHOTON INC.
- Hiroshi UMEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE
- Publication number 20140138561
- Publication date May 22, 2014
- GIGAPHOTON INC.
- Hiroshi UMEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPAR...
- Publication number 20140061512
- Publication date Mar 6, 2014
- GIGAPHOTON INC.
- Hiroshi UMEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY APPARATUS, CHAMBER, AND EXTREME ULTRAVIOLET LIGHT GEN...
- Publication number 20140008552
- Publication date Jan 9, 2014
- Hiroshi UMEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
TARGET SUPPLY DEVICE
- Publication number 20130228709
- Publication date Sep 5, 2013
- GIGAPHOTON INC.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET SUPPLY UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20120241650
- Publication date Sep 27, 2012
- GIGAPHOTON INC.
- Takayuki YABU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Hiroshi UMEDA

Person

Patents Grantslast 30 patents

High voltage pulse generation device, gas laser apparatus, and elec...

Laser system

Excimer laser device

Gas laser device and condenser

Laser system

Extreme ultraviolet light generation device

Laser system

Laser chamber

Extreme ultraviolet light generation apparatus including target dro...

Target supply device and EUV light generation chamber

Target supply device and extreme ultraviolet light generation appar...

Target supply device

Target supply device

Target supply device and extreme ultraviolet light generation appar...

Target supply unit and extreme ultraviolet light generation apparatus

Target supply apparatus, chamber, and extreme ultraviolet light gen...

Patents Applicationslast 30 patents

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

CHAMBER OF GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD

GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD

HIGH VOLTAGE PULSE GENERATION DEVICE, GAS LASER APPARATUS, AND ELEC...

HIGH-VOLTAGE PULSE GENERATOR, GAS LASER APPARATUS, AND METHOD FOR M...

GAS LASER DEVICE

HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS

GAS LASER DEVICE

LASER SYSTEM

EXCIMER LASER DEVICE

LASER SYSTEM

PULSE POWER MODULE

HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE

LASER SYSTEM

GAS LASER DEVICE AND CONDENSER

LASER CHAMBER

EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS AND CONTROL METHOD F...

TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPAR...

TARGET SUPPLY DEVICE AND EUV LIGHT GENERATION CHAMBER

TARGET SUPPLY DEVICE

TARGET SUPPLY DEVICE

TARGET SUPPLY DEVICE AND EXTREME ULTRAVIOLET LIGHT GENERATION APPAR...

TARGET SUPPLY APPARATUS, CHAMBER, AND EXTREME ULTRAVIOLET LIGHT GEN...

TARGET SUPPLY DEVICE

TARGET SUPPLY UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS