Hiroshi YAMASHITA

Person

Sagamihara, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-beam blanking device and multi-charged-particle-beam writing...
- Patent number 11,355,302
- Issue date Jun 7, 2022
- NuFlare Technology, Inc.
- Hiroshi Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 11,189,554
- Issue date Nov 30, 2021
- NuFlare Technology, Inc.
- Shiro Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aperture for inspecting multi beam, beam inspection apparatus for m...
- Patent number 10,283,316
- Issue date May 7, 2019
- NuFlare Technology, Inc.
- Hiroshi Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aperture set for multi-beam and multi-charged particle beam writing...
- Patent number 10,211,023
- Issue date Feb 19, 2019
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method for blanking device for blanking multi charged pa...
- Patent number 9,880,215
- Issue date Jan 30, 2018
- NuFlare Technology, Inc.
- Hiroshi Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Blanking device for multi-beam of charged particle writing apparatu...
- Patent number 9,805,905
- Issue date Oct 31, 2017
- NuFlare Technology, Inc.
- Hiroshi Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam drawing apparatus and drawing data generation...
- Patent number 9,779,913
- Issue date Oct 3, 2017
- NuFlare Technology, Inc.
- Shigehiro Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Blanking aperture array and charged particle beam writing apparatus
- Patent number 9,530,616
- Issue date Dec 27, 2016
- NuFlare Technology, Inc.
- Hiroshi Yamashita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRIT...
- Publication number 20240029999
- Publication date Jan 25, 2024
- NuFlare Technology, Inc.
- Hiroshi Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM BLANKING DEVICE AND MULTI-CHARGED-PARTICLE-BEAM WRITING...
- Publication number 20210296074
- Publication date Sep 23, 2021
- NuFlare Technology, Inc.
- Hiroshi YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20200091056
- Publication date Mar 19, 2020
- NuFlare Technology, Inc.
- Shiro Okada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20190051494
- Publication date Feb 14, 2019
- NuFlare Technology, Inc.
- Hiroshi Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APERTURE SET FOR MULTI-BEAM AND MULTI-CHARGED PARTICLE BEAM WRITING...
- Publication number 20180182593
- Publication date Jun 28, 2018
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APERTURE FOR INSPECTING MULTI BEAM, BEAM INSPECTION APPARATUS FOR M...
- Publication number 20180040455
- Publication date Feb 8, 2018
- NuFlare Technology, Inc.
- Hiroshi Yamashita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING DATA GENERATION...
- Publication number 20160284510
- Publication date Sep 29, 2016
- NuFlare Technology, Inc.
- Shigehiro HARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLANKING APERTURE ARRAY AND CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20160099129
- Publication date Apr 7, 2016
- NuFlare Technology, Inc.
- Hiroshi YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION METHOD FOR BLANKING DEVICE FOR BLANKING MULTI CHARGED PA...
- Publication number 20160061876
- Publication date Mar 3, 2016
- NuFlare Technology, Inc.
- Hiroshi YAMASHITA
- G01 - MEASURING TESTING
Information Patent Application
BLANKING DEVICE FOR MULTI CHARGED PARTICLE BEAMS, MULTI CHARGED PAR...
- Publication number 20160064179
- Publication date Mar 3, 2016
- NuFlare Technology, Inc.
- Hiroshi YAMASHITA
- H01 - BASIC ELECTRIC ELEMENTS

Hiroshi YAMASHITA

Person

Patents Grantslast 30 patents

Multi-beam blanking device and multi-charged-particle-beam writing...

Semiconductor device

Aperture for inspecting multi beam, beam inspection apparatus for m...

Aperture set for multi-beam and multi-charged particle beam writing...

Inspection method for blanking device for blanking multi charged pa...

Blanking device for multi-beam of charged particle writing apparatu...

Charged particle beam drawing apparatus and drawing data generation...

Blanking aperture array and charged particle beam writing apparatus

Patents Applicationslast 30 patents

BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRIT...

MULTI-BEAM BLANKING DEVICE AND MULTI-CHARGED-PARTICLE-BEAM WRITING...

SEMICONDUCTOR DEVICE

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

APERTURE SET FOR MULTI-BEAM AND MULTI-CHARGED PARTICLE BEAM WRITING...

APERTURE FOR INSPECTING MULTI BEAM, BEAM INSPECTION APPARATUS FOR M...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND DRAWING DATA GENERATION...

BLANKING APERTURE ARRAY AND CHARGED PARTICLE BEAM WRITING APPARATUS

INSPECTION METHOD FOR BLANKING DEVICE FOR BLANKING MULTI CHARGED PA...

BLANKING DEVICE FOR MULTI CHARGED PARTICLE BEAMS, MULTI CHARGED PAR...