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Hiroshi Yamauchi
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Miyagi, JP
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last 30 patents
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Patent Grant
Plasma processing method and method for manufacturing an electronic...
Patent number
7,928,018
Issue date
Apr 19, 2011
Foundation for Advancement of International Science
Tadahiro Ohmi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Plasma Processing Method and Method for Manufacturing an Electronic...
Publication number
20080268657
Publication date
Oct 30, 2008
Foundation for Advancement of International Science
Tadahiro Ohmi
H01 - BASIC ELECTRIC ELEMENTS