Hiroshi Yanazawa

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Tokyo, JP

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Patents Grantslast 30 patents

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Method of forming a microscopic pattern with far UV pattern exposur...
- Patent number 4,614,706
- Issue date Sep 30, 1986
- Hitachi, Ltd.
- Toshiharu Matsuzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming a microscopic pattern
- Patent number 4,536,421
- Issue date Aug 20, 1985
- Hitachi, Ltd.
- Toshiharu Matsuzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY