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Hiroshi YONEKURA

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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate, substrate holding apparatus, analysis apparatus, program...
    • Patent number 8,686,743
    • Issue date Apr 1, 2014
    • Philtech Inc.
    • Yuji Furumura
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Substrate temperature regulation fixed apparatus
    • Patent number 8,641,825
    • Issue date Feb 4, 2014
    • Shinko Electric Industries Co., Ltd.
    • Hiroshi Yonekura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 8,542,474
    • Issue date Sep 24, 2013
    • Shinko Electric Industries Co., Ltd.
    • Hiroshi Yonekura
    • Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
  • Information Patent Grant

    Electrostatic chuck
    • Patent number 8,023,248
    • Issue date Sep 20, 2011
    • Shinko Electric Industries Co., Ltd.
    • Hiroshi Yonekura
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20110096460
    • Publication date Apr 28, 2011
    • Shinko Electric Industries Co., Ltd.
    • Hiroshi YONEKURA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20100220425
    • Publication date Sep 2, 2010
    • Shinko Electric Industries Co., Ltd.
    • Hiroshi Yonekura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate, substrate holding apparatus, analysis apparatus, program...
    • Publication number 20100134122
    • Publication date Jun 3, 2010
    • Philtech Inc.
    • Yuji Furumura
    • G01 - MEASURING TESTING
  • Information Patent Application

    SUBSTRATE TEMPERATURE REGULATION FIXED APPARATUS
    • Publication number 20090308538
    • Publication date Dec 17, 2009
    • Shinko Electric Industries Co., Ltd.
    • Hiroshi YONEKURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICES
    • Publication number 20090159590
    • Publication date Jun 25, 2009
    • Shinko Electric Industries Co., Ltd.
    • Hiroshi Yonekura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20090059461
    • Publication date Mar 5, 2009
    • Shinko Electric Industries Co., Ltd.
    • Hiroshi Yonekura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate heating device
    • Publication number 20080110874
    • Publication date May 15, 2008
    • Shinko Electric Industries Co., Ltd.
    • Naoto Hayashi
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Electrostatic chuck
    • Publication number 20080037196
    • Publication date Feb 14, 2008
    • Shinko Electric Industries Co., Ltd.
    • Hiroshi Yonekura
    • H01 - BASIC ELECTRIC ELEMENTS