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Hiroshi Yoshii
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Kyoto, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Cup and substrate processing apparatus
Patent number
10,160,012
Issue date
Dec 25, 2018
SCREEN Semiconductor Solutions Co., Ltd.
Minoru Sugiyama
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate cleaning device and substrate processing apparatus includ...
Patent number
8,286,293
Issue date
Oct 16, 2012
Sokudo Co., Ltd.
Koji Nishiyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning and processing apparatus with magnetically contr...
Patent number
8,166,985
Issue date
May 1, 2012
Sokudo Co., Ltd.
Koji Nishiyama
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Bevel inspection apparatus for substrate processing
Patent number
7,641,406
Issue date
Jan 5, 2010
Sokudo Co., Ltd.
Joichi Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate spin treating method and apparatus
Patent number
5,788,773
Issue date
Aug 4, 1998
Dainippon Screen Mfg. Co., Ltd.
Seiichiro Okuda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CUP AND SUBSTRATE PROCESSING APPARATUS
Publication number
20130133708
Publication date
May 30, 2013
Minoru SUGIYAMA
B08 - CLEANING
Information
Patent Application
SUBSTRATE CLEANING AND PROCESSING APPARATUS WITH MAGNETICALLY CONTR...
Publication number
20090120472
Publication date
May 14, 2009
SOKUDO CO., LTD.
Koji Nishiyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Bevel Inspection Apparatus For Substrate Processing
Publication number
20090027634
Publication date
Jan 29, 2009
SOKUDO CO., LTD.
Joichi Nishimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate Cleaning Device And Substrate Processing Apparatus Inclu...
Publication number
20090025155
Publication date
Jan 29, 2009
SOKUDO CO., LTD.
Koji Nishiyama
H01 - BASIC ELECTRIC ELEMENTS