Hiroshige UCHIDA

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Kudamatsu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,872,774
- Issue date Dec 22, 2020
- HITACHI HIGH-TECH CORPORATION
- Hao Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching a sample
- Patent number 8,114,244
- Issue date Feb 14, 2012
- Hitachi High-Technologies Corporation
- Kousa Hirota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching endpoint determination method
- Patent number 8,083,960
- Issue date Dec 27, 2011
- Hitachi High-Technologies Corporation
- Hiroshige Uchida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20200035445
- Publication date Jan 30, 2020
- Hitachi High-Technologies Corporation
- Hao XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Etching Apparatus
- Publication number 20120085494
- Publication date Apr 12, 2012
- Hiroshige Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SEASONING PLASMA PROCESSING APPARATUS, AND METHOD FOR DE...
- Publication number 20100178415
- Publication date Jul 15, 2010
- Hitachi High-Technologies Corporation
- Yasuhiro NISHIMORI
- B08 - CLEANING
Information Patent Application
METHOD FOR ETCHING A SAMPLE
- Publication number 20100159704
- Publication date Jun 24, 2010
- Hitachi High-Technologies Corporation
- Kousa HIROTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING ENDPOINT DETERMINATION METHOD
- Publication number 20090211706
- Publication date Aug 27, 2009
- Hitachi High-Technologies Corporation
- Hiroshige Uchida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20080216956
- Publication date Sep 11, 2008
- SHIGERU NAKAMOTO
- G01 - MEASURING TESTING