Hirosi NISIHATA

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method and non-tra...
- Patent number 9,805,958
- Issue date Oct 31, 2017
- Tokyo Electron Limited
- Atsushi Ookouchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method and non-tra...
- Patent number 9,704,730
- Issue date Jul 11, 2017
- Tokyo Electron Limited
- Atsushi Ookouchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD AND NON-TRA...
- Publication number 20170256427
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Atsushi OOKOUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD AND NON-TRA...
- Publication number 20140352737
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Atsushi OOKOUCHI
- H01 - BASIC ELECTRIC ELEMENTS