Hirotaka Kato

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Nagasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing epitaxial silicon wafer and apparatus therefor
- Patent number 8,888,913
- Issue date Nov 18, 2014
- Sumco Techxiv Corporation
- Kazuhiro Narahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing epitaxial silicon wafer and apparatus therefor
- Patent number 8,021,484
- Issue date Sep 20, 2011
- Sumco Techxiv Corporation
- Kazuhiro Narahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing epitaxial silicon wafer
- Patent number 7,993,452
- Issue date Aug 9, 2011
- Sumco Techxiv Corporation
- Koichiro Hayashida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF MANUFACTURING EPITAXIAL SILICON WAFER AND APPARATUS THEREFOR
- Publication number 20120015454
- Publication date Jan 19, 2012
- Sumco Techxiv Corporation
- Kazuhiro Narahara
- C30 - CRYSTAL GROWTH
Information Patent Application
Method of manufacturing epitaxial silicon wafer
- Publication number 20070228524
- Publication date Oct 4, 2007
- Sumco Techxiv Corporation
- Koichiro Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing epitaxial silicon wafer and apparatus thereof
- Publication number 20070227441
- Publication date Oct 4, 2007
- Kazuhiro Narahara
- C30 - CRYSTAL GROWTH