Hirotaka Kohno

Person

Kumagaya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,846,371
- Issue date Dec 19, 2017
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, and exposure method, with recovery device to re...
- Patent number 9,798,245
- Issue date Oct 24, 2017
- Nikon Corporation
- Yasufumi Nishii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 9,746,781
- Issue date Aug 29, 2017
- Nikon Corporation
- Hirotaka Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 9,599,907
- Issue date Mar 21, 2017
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,268,237
- Issue date Feb 23, 2016
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,235,139
- Issue date Jan 12, 2016
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 9,019,467
- Issue date Apr 28, 2015
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,488,099
- Issue date Jul 16, 2013
- Nikon Corporation
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 8,384,880
- Issue date Feb 26, 2013
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure method, substrate stage, exposure apparatus, and device ma...
- Patent number 8,208,117
- Issue date Jun 26, 2012
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus, exposure apparatus, and exposure method with recov...
- Patent number 7,982,857
- Issue date Jul 19, 2011
- Nikon Corporation
- Yasufumi Nishii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
STAGE APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD
- Publication number 20180004096
- Publication date Jan 4, 2018
- Nikon Corporation
- Yasufumi Nishii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20170329234
- Publication date Nov 16, 2017
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20170329239
- Publication date Nov 16, 2017
- Nikon Corporation
- Hirotaka Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20150301457
- Publication date Oct 22, 2015
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20140307238
- Publication date Oct 16, 2014
- Nikon Corporation
- Hirotaka Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20130271739
- Publication date Oct 17, 2013
- Nikon Corporation
- Hiroyuki NAGASAKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20130141703
- Publication date Jun 6, 2013
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...
- Publication number 20130141701
- Publication date Jun 6, 2013
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus, exposure apparatus, and exposure method
- Publication number 20110080574
- Publication date Apr 7, 2011
- Nikon Corporation
- Yasufumi Nishii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20090262316
- Publication date Oct 22, 2009
- Nikon Corporation
- Hirotaka Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, substrate stage, exposure apparatus, and device ma...
- Publication number 20090015816
- Publication date Jan 15, 2009
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, substrate stage, exposure apparatus, and device ma...
- Publication number 20090015808
- Publication date Jan 15, 2009
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20080137047
- Publication date Jun 12, 2008
- Nikon Corporation
- Takeyuki Mizutani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus and Device Producing Method
- Publication number 20080018866
- Publication date Jan 24, 2008
- NIKON CORPORATION
- Hiroyuki Nagasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20070252964
- Publication date Nov 1, 2007
- Nikon Corporation
- Hirotaka Kohno
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Stage apparatus, exposure apparatus, and exposure method
- Publication number 20070109521
- Publication date May 17, 2007
- Nikon Corporation
- Yasufumi Nishii
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, substrate stage, exposure apparatus, and device ma...
- Publication number 20060227312
- Publication date Oct 12, 2006
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure method, substrate stage, exposure apparatus, and device ma...
- Publication number 20060139614
- Publication date Jun 29, 2006
- Nikon Corporation
- Soichi Owa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hirotaka Kohno

Person

Patents Grantslast 30 patents

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure apparatus, and exposure method, with recovery device to re...

Exposure apparatus and method for producing device

Exposure apparatus and device manufacturing method

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure apparatus and device manufacturing method

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Stage apparatus, exposure apparatus, and exposure method with recov...

Patents Applicationslast 30 patents

STAGE APPARATUS, EXPOSURE APPARATUS, AND EXPOSURE METHOD

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MA...

Stage apparatus, exposure apparatus, and exposure method

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure apparatus and device manufacturing method

Exposure Apparatus and Device Producing Method

Exposure apparatus and method for producing device

Stage apparatus, exposure apparatus, and exposure method

Exposure method, substrate stage, exposure apparatus, and device ma...

Exposure method, substrate stage, exposure apparatus, and device ma...