Hirotaka Kuwada

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,732,357
- Issue date Aug 22, 2023
- Tokyo Electron Limited
- Tsuyoshi Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas processing apparatus and gas processing method
- Patent number 11,499,225
- Issue date Nov 15, 2022
- Tokyo Electron Limited
- Hirotaka Kuwada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film-forming apparatus and film-forming method
- Patent number 11,248,293
- Issue date Feb 15, 2022
- Tokyo Electron Limited
- Hirotaka Kuwada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200392622
- Publication date Dec 17, 2020
- TOKYO ELECTRON LIMITED
- Tsuyoshi TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING APPARATUS AND FILM-FORMING METHOD
- Publication number 20200071831
- Publication date Mar 5, 2020
- TOKYO ELECTRON LIMITED
- Hirotaka KUWADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS PROCESSING APPARATUS AND GAS PROCESSING METHOD
- Publication number 20200048765
- Publication date Feb 13, 2020
- TOKYO ELECTRON LIMITED
- Hirotaka KUWADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film Forming Apparatus and Film Forming Method
- Publication number 20200048764
- Publication date Feb 13, 2020
- TOKYO ELECTRON LIMITED
- Hirotaka KUWADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20180112312
- Publication date Apr 26, 2018
- TOKYO ELECTRON LIMITED
- Masaya ODAGIRI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD
- Publication number 20120094014
- Publication date Apr 19, 2012
- TOKYO ELECTRON LIMITED
- Yuji Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hirotaka Kuwada

Person

Patents Grantslast 30 patents

Substrate processing method and substrate processing apparatus

Gas processing apparatus and gas processing method

Film-forming apparatus and film-forming method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

FILM-FORMING APPARATUS AND FILM-FORMING METHOD

GAS PROCESSING APPARATUS AND GAS PROCESSING METHOD

Film Forming Apparatus and Film Forming Method

FILM FORMING APPARATUS AND FILM FORMING METHOD

VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD