Hirotaka Maruyama

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,923,220
- Issue date Mar 5, 2024
- Tokyo Electron Limited
- Naoyuki Okamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing method, substrate processing apparatus, and stora...
- Patent number 10,192,731
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Hirotaka Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and liquid mixing method
- Patent number 10,067,514
- Issue date Sep 4, 2018
- Tokyo Electron Limited
- Yasuo Kiyohara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate liquid treatment apparatus, method of cleaning substrate...
- Patent number 10,037,901
- Issue date Jul 31, 2018
- Tokyo Electron Limited
- Kazuya Koyama
- B08 - CLEANING
Information Patent Grant
Substrate processing method, substrate processing apparatus, and st...
- Patent number 9,362,106
- Issue date Jun 7, 2016
- Sony Corporation
- Hayato Iwamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing apparatus having switchable nozzles
- Patent number 9,108,228
- Issue date Aug 18, 2015
- Tokyo Electron Limited
- Takahisa Otsuka
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 8,978,671
- Issue date Mar 17, 2015
- Tokyo Electron Limited
- Satoru Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, storage medium storing computer progra...
- Patent number 8,906,165
- Issue date Dec 9, 2014
- Tokyo Electron Limited
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus, cleaning method and recording medium
- Patent number 8,308,870
- Issue date Nov 13, 2012
- Tokyo Electron Limited
- Teruomi Minami
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210043482
- Publication date Feb 11, 2021
- TOKYO ELECTRON LIMITED
- Naoyuki OKAMURA
- G01 - MEASURING TESTING
Information Patent Application
LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORA...
- Publication number 20170256392
- Publication date Sep 7, 2017
- TOKYO ELECTRON LIMITED
- Hirotaka Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID TREATMENT APPARATUS, METHOD OF CLEANING SUBSTRATE...
- Publication number 20150328668
- Publication date Nov 19, 2015
- TOKYO ELECTRON LIMITED
- Kazuya KOYAMA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND LIQUID MIXING METHOD
- Publication number 20150146498
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Yasuo Kiyohara
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD
- Publication number 20140373877
- Publication date Dec 25, 2014
- Shigehisa Inoue
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...
- Publication number 20140080312
- Publication date Mar 20, 2014
- Hayato IWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND COMPUTER...
- Publication number 20130228200
- Publication date Sep 5, 2013
- TOKYO ELECTRON LIMITED
- Takahisa Otsuka
- B08 - CLEANING
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20120164840
- Publication date Jun 28, 2012
- Satoru Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...
- Publication number 20110308549
- Publication date Dec 22, 2011
- TOKYO ELECTRON LIMITED
- Teruomi MINAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS, CLEANING METHOD AND RECORDING MEDIUM
- Publication number 20100108103
- Publication date May 6, 2010
- TOKYO ELECTRON LIMITED
- Teruomi MINAMI
- H01 - BASIC ELECTRIC ELEMENTS

Hirotaka Maruyama

Person

Patents Grantslast 30 patents

Substrate processing apparatus

Liquid processing method, substrate processing apparatus, and stora...

Substrate processing apparatus and liquid mixing method

Substrate liquid treatment apparatus, method of cleaning substrate...

Substrate processing method, substrate processing apparatus, and st...

Liquid processing apparatus having switchable nozzles

Substrate processing method and substrate processing apparatus

Substrate processing method, storage medium storing computer progra...

Cleaning apparatus, cleaning method and recording medium

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORA...

SUBSTRATE LIQUID TREATMENT APPARATUS, METHOD OF CLEANING SUBSTRATE...

SUBSTRATE PROCESSING APPARATUS AND LIQUID MIXING METHOD

LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND ST...

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND COMPUTER...

Substrate Processing Method and Substrate Processing Apparatus

SUBSTRATE PROCESSING METHOD, STORAGE MEDIUM STORING COMPUTER PROGRA...

CLEANING APPARATUS, CLEANING METHOD AND RECORDING MEDIUM