Hirotaka Okonogi

Follow

Person

Annaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Planarizing device and a planarization method for semiconductor sub...
- Patent number 7,238,087
- Issue date Jul 3, 2007
- Okamoto Machine Tool Works, Ltd.
- Moriyuki Kashiwa
- B24 - GRINDING POLISHING