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Hirotaka Toyoda
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Nagoya-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma generation apparatus
Patent number
11,152,193
Issue date
Oct 19, 2021
NATIONAL UNIVERSITY CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH...
Hirotaka Toyoda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microwave supply apparatus, plasma processing apparatus, and plasma...
Patent number
9,852,892
Issue date
Dec 26, 2017
Tokyo Electron Limited
Hitoshi Itoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High density microwave plasma generation apparatus, and magnetron s...
Patent number
9,506,142
Issue date
Nov 29, 2016
Sumitomo Riko Company Limited
Kensuke Sasai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Microwave waveguide apparatus, plasma processing apparatus and plas...
Patent number
9,252,000
Issue date
Feb 2, 2016
National University Corporation Nagoya University
Hitoshi Itoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma generating apparatus, plasma processing apparatus and plasma...
Patent number
8,610,353
Issue date
Dec 17, 2013
Tokyo Electron Limited
Hitoshi Itoh
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
PLASMA GENERATION APPARATUS
Publication number
20200335308
Publication date
Oct 22, 2020
National University Corporation Tokai National Higher Education and Research...
Hirotaka TOYODA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA TREATMENT APPARATUS
Publication number
20200086291
Publication date
Mar 19, 2020
SUMITOMO RIKO COMPANY LIMITED
Kensuke SASAI
C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information
Patent Application
MICROWAVE SUPPLY APPARATUS, PLASMA PROCESSING APPARATUS, AND PLASMA...
Publication number
20170365446
Publication date
Dec 21, 2017
TOKYO ELECTRON LIMITED
Hitoshi ITOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING CONDUCTIVE FILM
Publication number
20150056381
Publication date
Feb 26, 2015
NATIONAL UNIVERSITY CORPORATION NAGOYA UNIVERSITY
Masaru Hori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MICROWAVE WAVEGUIDE APPARATUS, PLASMA PROCESSING APPARATUS AND PLAS...
Publication number
20140251955
Publication date
Sep 11, 2014
National University Corporation Nagoya University
Hitoshi Itoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA GENERATION DEVICE, PLASMA PROCESSING APPARATUS AND PLASMA PR...
Publication number
20140008326
Publication date
Jan 9, 2014
National University Corporation Nagoya University
Hirotaka TOYODA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
HIGH DENSITY MICROWAVE PLASMA GENERATION APPARATUS, AND MAGNETRON S...
Publication number
20130270110
Publication date
Oct 17, 2013
Kensuke Sasai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA GENERATING APPARATUS, PLASMA PROCESSING APPARATUS AND PLASMA...
Publication number
20120068603
Publication date
Mar 22, 2012
National University Corporation Nagoya University
Hitoshi ITOH
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR