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Tokyo, JP
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last 30 patents
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Patent Grant
Silicon cleaning method for semiconductor materials and polycrystal...
Patent number
7,223,303
Issue date
May 29, 2007
Mitsubishi Materials Corporation
Hirotake Ohta
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
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Patent Application
Silicon cleaning method for semiconductor materials and polycrystal...
Publication number
20060042539
Publication date
Mar 2, 2006
MITSUBISHI MATERIALS CORPORATION
Hirotake Ohta
C30 - CRYSTAL GROWTH