Hiroto FUJIKAWA

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Patents Grantslast 30 patents

Information Patent Grant
Method for forming film and processing apparatus
- Patent number 12,112,943
- Issue date Oct 8, 2024
- Tokyo Electron Limited
- Keita Kumagai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20250029843
- Publication date Jan 23, 2025
- TOKYO ELECTRON LIMITED
- Hiroto FUJIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240328033
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Tuhin Shuvra BASU
- C30 - CRYSTAL GROWTH
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240327984
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Tuhin Shuvra Basu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING FILM AND PROCESSING APPARATUS
- Publication number 20220319843
- Publication date Oct 6, 2022
- TOKYO ELECTRON LIMITED
- Keita KUMAGAI
- H01 - BASIC ELECTRIC ELEMENTS